Preparation of Bi_<3.25+x>La_<0.75>Ti_3O_<12+y> Films on Ruthenium Electrodes
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概要
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Bi_<3.25+x>La_<0.75>Ti_3O_<12+y> (BLT) films were prepared on Ru electrodes by the sol-gel spin-coating method. The samples crystallized at 650℃ in O_2 atmosphere and showed ferroelectric properties. It was found that the ferroelectric properties were very sensitive to the amount of prepared Bi composition, and the sample with an optimum Bi amount showed polarization-electric field (P-E) hysteresis curve with remanent polarization (2P_r) of 25μC/cm^2 . In this sample, however, the leakage current was larger than that in a BLT film formed on a Pt electrode, and the capacitor broke down after 10^9 switching cycles. Then, annealing in N_2 atmosphere was conducted. In this sample, the leakage current and fatigue properties were improved and the sample with a large 2P_r of 20μC/cm^2 could endure 10^<10> switching cycles. [DOI: 10.1143/JJAP.41.2105]
- 社団法人応用物理学会の論文
- 2002-04-15
著者
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Kuroiwa Takeharu
R&d Associations For Future Electron Devices:frontier Collaborative Research Center Tokyo Instit
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Sugahara Kazuyuki
R&d Associations For Future Electron Devices:frontier Collaborative Research Center Tokyo Instit
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ISHIWARA Hiroshi
Frontier Collaborative Research Center, Tokyo Institute of Technology
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Ishiwara H
Tokyo Institute Of Technology Interdisciplinary Graduate School Of Science And Engineering
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Ishiwara Hiroshi
Frontier Collaborative Research Center Tokyo Insitute Of Technology
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SATO Takehiko
R&D Associations for Future Electron Devices
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KUROIWA Takeharu
R&D Associations for Future Electron Devices
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SUGAHARA Kazuyuki
R&D Associations for Future Electron Devices
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Sato Takehiko
R&d Associations For Future Electron Devices:frontier Collaborative Research Center Tokyo Instit
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