Substrate Orientation Dependence of the Properties of Metal-Ferroelectric BaMgF_4-Silicon Capacitors by Post-Deposition Annealing
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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ISHIWARA Hiroshi
Precision and Intelligence Laboratory, Tokyo Institute of Technology
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheongju University
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Kim J‐d
Department Of Electrical And Computer Engineering Kanazawa University
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Kim Je-deok
Department Of Semiconductor Engineering Cheong-ju University
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Ishiwara Hiroshi
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Ishiwara Hiroshi
Tokyo Institute Of Technology Interdisciplinary Graduate School Of Science And Engineering
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Ishiwara Hiroshi
Precision & Intelligence Laboratory Tokyo Institute Of Technology
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheong-ju University
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Kim Kwang-ho
Department Of Architecture Inha University
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Ishiwara H
Tokyo Institute Of Technology Interdisciplinary Graduate School Of Science And Engineering
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Kim Je-deok
Department Of Electrical And Computer Engineering Kanazawa University
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KIM Kwang-Ho
Department of Semiconductor Engineering, Cheong-Ju University
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