ED2000-68 / SDM2000-68 Calculation of polarization and mobile charge density in ferroelectric films on Si using TVS (Triangular Voltage Sweep) method
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概要
- 論文の詳細を見る
The detection technique both the polarization and the mobile charge density at the same time in ferroelectric films on Si using TVS method have been proposed. This TVS method yield a polarizable and an ionic displacement current peaks whose areas are proportional to the total polaization reversal charge and the total mobile ionic space charge, respectively. The calculated polarization and the mobile charge density TVS measured at 250℃ were 0.42μC / cm^2 and 5.5 × 10^<11> mobile ions / cm^2 in the SBT film of MFIS structure, and 1.4μC / cm^2 in the LiNbO_3 films of MFS structure, respectively.
- 社団法人電子情報通信学会の論文
- 2000-06-22
著者
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Lee Won-jae
Electronics And Telecommunications Research Institute
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Lee Won-jae
Research Center For Electronic Ceramics (rcec) Department Of Advanced Materials Engineering Dong-eui
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Kim Kwang-ho
Department Of Semiconductor Engineering Cheongju University
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JEONG Sang
Department of Physiology, College of Veterinary Medicine, Konkuk University
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Yu B‐g
It Convergence And Component Laboratory Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Lee Nam-yeal
Department Of Semiconductor Engineering Cheongju University
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Jeong Sang-hyun
Department Of Semiconductor Engineering Cheongju University
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You In
Electronics And Telecommunications Research Institute
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Lee Won-jae
Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology
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Lee Won-jae
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Kim Jin-kyu
Department Of Semiconductor Engineering Cheongju University
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Kim Y‐s
Department Of Semiconductor Engineering Cheongju University
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Kim Yong-Seong
Department of Semiconductor Engineering, Cheongju University
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Jung Soon-Won
Department of Semiconductor Engineering, Cheongju University
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Yu Byung-Gon
Electronics and Telecommunications Research Institute
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Yang Yil-Suk
Electronics and Telecommunications Research Institute
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Kim Yong-seong
Department Of Semiconductor Engineering Cheongju University
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Kim Kwang-ho
Department Of Architecture Inha University
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Jung Soon-won
It Convergence & Components Laboratory Electronics And Telecommunications Research Institute
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Jung Soon-won
Department Of Semiconductor Engineering Cheongju University
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Jeong Sang
Department Of Dermatology And Division Of Brain Korea 21 Project For Biomedical Science Korea Univer
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Kim Yong-seong
Department Of Physical Therapy Nambu University
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Jeong Sang
Department of Chemical Engineering, Chungbuk National University
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