Formation of Ferroelectric Thin Films for MFIS or MFMIS Structure

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概要

• 論文の詳細を見る

• Ferroelectric thin films have been studied for the application of MFIS(Metal-Ferroelectric-Insulator-Semiconductor)structure to non-volatile memory devices. Most important requirement of the ferroelectric thin films for MFISFET is an endurance of the hysteretic characteristics of the ferroelectric film at high temperature during the thermal cycles of source/drain formation and silicon dioxide glass flowing.To obtain optimum parameters of the ferroelectric films for reasonable operation as a switching transistor, I-V characteristics of MFIS were calculated by using Miller's MFIS model, and drain current and hysteretic window of MFISFET have also been investigated.Crystalline structures and element profiles in the film as well as remanent polarization of the MFIS capacitors were also investigated.The calculated results were compared with the experimental ones from the fabricated MFIS.

• 社団法人電子情報通信学会の論文
• 1998-07-24

著者

• Lee Won-jae

  Electronics And Telecommunications Research Institute

• Kim Bo

  Micro-electronics Technology Laboratory Etri

• Yu Byoung-Gon

  Semiconductor Division, ETRI,

• Lee Won-Jae

  Semiconductor Division, ETRI,

• Lyu Jong-Son

  Semiconductor Division, ETRI,

• Lee Jin-Hyo

  Semiconductor Division, ETRI,

• Kim Bo

  Semiconductor Division, ETRI,

• Lee Won-jae

  Research Center For Electronic Ceramics (rcec) Department Of Advanced Materials Engineering Dong-eui

• YU Byoung-Gon

  IT Convergence and Component Laboratory, Electronics and Telecommunications Research Institute

• Yu Byoung-gon

  Electronics And Telecommunications Research Institute

• Yu Byoung-gon

  Semiconductor Division Electronics And Telecommunications Research Institute

• Yu Byoung-gon

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

• Lyu J‐s

  Electronics And Telecommunications Res. Inst. Daejon Kor

• Lyu Jong-son

  Semiconductor Division Etri

• Lee Won-jae

  Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology

• Lee Won-jae

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

• Lee Jin-ho

  Microwave Devices Team Etri

• Kim B

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

• Lee Jin-hyo

  Semiconductor Division Etri

• Kim Bo-woo

  Micro-electronics Laboratory Electronics And Telecommunications Research Institute

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