Etching Behavior and Damage Recovery of SrBi_2Ta_2O_9 Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-12-01
著者
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Lee Won-jae
Electronics And Telecommunications Research Institute
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LEE Hee
Department of Pharmacology, College of Medicine, Kohwang Medical Research Institute, Kyung Hee Unive
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Kim Bo
Micro-electronics Technology Laboratory Etri
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LEE Won-Jae
Micro-Electronics Technology Laboratory, ETRI
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CHO Chae-Ryong
Micro-Electronics Technology Laboratory, ETRI
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KIM Shi-Ho
Micro-Electronics Technology Laboratory, ETRI
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YOU In-Kyu
Micro-Electronics Technology Laboratory, ETRI
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YU Byoung-Gon
Micro-Electronics Technology Laboratory, ETRI
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SHIN Chang
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST)
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Cho Chae-Ryung
Micro-Electronics Technology Laboratory, ETRI
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Shin Chang-Ho
Korea Advanced Institute of Science and Technology (KAIST)
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Lee Won-jae
Research Center For Electronic Ceramics (rcec) Department Of Advanced Materials Engineering Dong-eui
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YU Byoung-Gon
IT Convergence and Component Laboratory, Electronics and Telecommunications Research Institute
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Yu B‐g
It Convergence And Component Laboratory Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Electronics And Telecommunications Research Institute
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Yu Byoung-gon
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Kim S‐h
Dept. Of Semiconductor Science Wonkwang University
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Cho C‐r
Micro-electronics Technology Laboratory Etri
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Cho Chae-ryong
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Lee Hee
Department Of Chemistry Pohang University Of Science And Technology
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Kim Shi-ho
Micro-electronics Technology Laboratory Etri
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You In-kyu
Basic Research Laboratory Electronics And Telecomunications Research Institute (etri)
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You In-kyu
Micro-electronics Technology Lab. Etri
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Lee Won-jae
Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology
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Lee Won-jae
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Kim S‐h
Wonkwang Univ. Jeonbuk Kor
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Kim B
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Kim Bo-woo
Micro-electronics Laboratory Electronics And Telecommunications Research Institute
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Lee Hee
Department Of Anesthesiology And Pain Medicine Hanyang University College Of Medicine
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