Effects of Ir Electrodes on the Dielectric Constants of Ba_<0.5>Sr_<0.5>TiO_3 Films
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概要
- 論文の詳細を見る
The effects of an iridium (Ir) electrode on the properties of Ba_<0.5>Sr_<0.5>TiO_3 (BST) films were studied, in comparison with a conventional platinum (Pt) electrode. It was found that the dielectric constant of BST films is strongly dependent on the electrode material. The BST films deposited on an Ir bottom electrode were preferentially oriented and showed higher dielectric constants than those on Pt. Higher dielectric constants of the BST films could also be obtained by using Ir instead of Pt as a top electrode material, which was explained as being due to the compressive stress in the BST film induced by the Ir top electrode.
- 社団法人応用物理学会の論文
- 1999-01-15
著者
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Lee Hee
Department Of Chemistry Pohang University Of Science And Technology
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Cha Seon
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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JANG Byung-Tak
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology
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Jang Byung-tak
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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Lee Hee
Department Of Anesthesiology And Pain Medicine Hanyang University College Of Medicine
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CHA Seon
Department of Electrical Engineering, Korea Advanced Institute of Science and Technology
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Cha Seon
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Korea
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