Influence of TiO2 Adhesion Layer Thickness on Properties of (Ba,Sr)TiO3 Thin Films
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概要
- 論文の詳細を見る
(Ba0.5Sr0.5)TiO3 thin films were deposited on Pt/TiO2/SiO2/Si substrates with various TiO2 adhesion layer thicknesses. The crystallinity of Pt thin films with (111) direction and the electrical properties of BST thin films strongly depend on the TiO2 adhesion layer thickness. TiO2 adhesion layers between the Pt and SiO2 layers with thicknesses smaller than 5 nm show good adhesion properties and a low leakage current density of BST thin films deposited on the Pt/TiO2/SiO2/Si substrate, which is lower than $8.8\times 10^{-8}$ A/cm2 at an applied voltage of 1 V. The optimal thickness of the TiO2 adhesion layer in the Pt/TiO2/SiO2/Si structure is very important to obtain good electrical properties of BST thin films as well as good adhesion properties.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-08-15
著者
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Kim Yong
Department And Research Institute Of Rehabilitation Medicine Yonsei University College Of Medicine
-
Lee Yong
Depart. Of Oncology Yonsei Univ. Wonju College Of Medicine
-
Lee Hee
Department Of Anesthesiology And Pain Medicine Hanyang University College Of Medicine
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Lee Yong
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea
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Kim Yong
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1, Guseong-dong, Yuseong-gu, Daejeon 305-701, Korea
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