Characteristics and the Model of Resistive Random Access Memory Switching of the Ti/TiO2 Resistive Material Depending on the Thickness of Ti
スポンサーリンク
概要
- 論文の詳細を見る
The effects of the reactive Ti layer on the resistive switching characteristics of TiN/Ti/TiO2/TiN resistive random access memory (ReRAM) are investigated. Nitridation at the top region of Ti during reactive sputtering of the TiN layer and oxygen gettering of Ti from TiO2 make the TiON/TiO2-x interface. It results in TiO2 with a higher concentration of oxygen vacancies during metal alloy annealing, resulting in the low-initial-resistance state. This leads to a stable bipolar switching after the first set process. A larger thickness of Ti decreases resistance value in the high-resistance state, which enables the adjustment of on/off resistance ratio.
- 2011-04-25
著者
-
PARK Sung
R&D Division, Hynix Semiconductor Inc.
-
SUNG Min
R&D Division, Hynix Semiconductor Inc.
-
JOO Moon
R&D Division, Hynix Semiconductor Inc.
-
Kim Yong
Department And Research Institute Of Rehabilitation Medicine Yonsei University College Of Medicine
-
Kim Wan
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Park Sung
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Sook
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Sook
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Wan
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Ja
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Yoo Jong
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Jung
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Gyun Byun
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Byun Jun
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Roh Jae
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Yoo Jong
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Ja
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Roh Jae
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Joo Moon
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Byun Jun
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Jung
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Gyun Byun
R&D Division, Hynix Semiconductor Inc., Ichon P. O. Box 1010, Ichon, Gyeonggi 467-701, Korea
-
Kim Yong
Department of Physics and Energy Harvest-Storage Research Center, University of Ulsan, P. O. Box 18, Ulsan 680-749, Korea
関連論文
- IS-90 Systematic Lymphadenectomy for Survival in Epithelial Ovarian Cancer A Meta-analysis(Group12 Oncology6,International Session)
- Influence of Post-Annealing on the Oxide Layer of AZ91 Mg Alloy Prepared by Plasma Electrolytic Oxidation
- Microsatellite instability and Epstein-Barr virus infection in gastric remnant cancers
- P1-IS-42 Epithelial Ovarian Tumors of Low Malignant Potential : The Role of Surgical Staging and Conservative Surgery
- P-IS-23 Uterine Papillary Serous Carcinoma (UPSC) : Retrospective Study of 21 Cases(Oncology 6,Group 93,International Session)
- Small intestinal stromal tumors : A clinicopathologic study of 31 tumors
- Ciliated foregut cyst of the gallbladder : A case report and review of the literature
- Stress-Driven Formation of InGaAs Quantum Dots on GaAs with Sub-Micron Platinum Pattern
- N-Terminal Pro-B-Type Natriuretic Peptide Predicts Significant Coronary Artery Lesion in the Unstable Angina Patients With Normal Electrocardiogram, Echocardiogram, and Cardiac Enzymes
- Retention Time Analysis on DRAM Cell Transistor from Planar to Nonplanar Gate Structures(Session 4 Silicon Devices II,AWAD2006)
- Retention Time Analysis on DRAM Cell Transistor from Planar to Nonplanar Gate Structures(Session 4 Silicon Devices II,AWAD2006)
- Retention Time Analysis on DRAM Cell Transistor from Planar to Nonplanar Gate Structures
- JTII-50 COMPLEMENTARY RELATION BETWEEN MRI AND FNAC IN DIAGNOSIS OF SOFT TISSUE TUMORS
- Malignant glomus tumor arising among multiple glomus tumors
- In vivo bioluminescence imaging of cord blood derived mesenchymal stem cell transplantation into rat myocardium
- CRM-51005, a New Phospholipase C Inhibitor Produced by Unidentified Fungal Strain MT51005
- PE-586 The Comparison of White Coat Effect in Elderly White Coat Hypertension Patients with Youngers(Hypertension, clinical-7 (H) PE102,Poster Session (English),The 70th Anniversary Annual Scientific Meeting of the Japanese Circulation Society)
- Antimalarial Activity of Herbal Extracts Used in Traditional Medicine in Korea(Pharmacognosy)
- Comparison of Low vs Moderate Dose of Atorvastatin in Clopidogrel Resistance After Coronary Stenting in Korean Patients With Acute Coronary Syndrome
- PE-625 A Case of Soleus Muscle Hematoma with Compartment Syndrome Complicated by Enoxaparin and Aspirin Therapy(Thromboembolism/Antithrombotic therapy/Thrombolysis-3 (H) PE111,Poster Session (English),The 70th Anniversary Annual Scientific Meeting of the
- 3-4-7 脳卒中片麻痺患者のADLに関する日韓比較(脳卒中・ADL(2),口演,一般演題,リハビリテーション医学の進歩と実践,第43回日本リハビリテーション医学会学術集会)
- Cytogenetic analysis in childhood acute lymphoblastic leukemia : experience at a single institution in Korea
- Sphingosine kinase inhibitor suppresses a T_h1 polarization via the inhibition of immunostimulatory activity in murine bone marrow-derived dendritic cells
- Systematic Lymphadenectomy Improves Survival in Patients with Advanced-Stage Primary Fallopian Tube Cancer
- Metalorganic Chemical Vapor Deposition of Epitaxial Perovskite SrIrO_3 Films on (100)SrTiO_3 Substrates
- Autonomic Radio Resource Control for QoS-Aware Multimedia Wireless Networks(Mobile Multimedia Communications)
- On angular estimate of analytic functions
- Baicalein Prevents 6-Hydroxydopamine-Induced Dopaminergic Dysfunction and Lipid Peroxidation in Mice
- PP-365 Clinicopathological analysis of 2, 137 early gastric cancer
- Berberine, a Natural Product, Combined with Cisplatin Enhanced Apoptosis through a Mitochondria/Caspase-Mediated Pathway in HeLa Cells(Analytical Biochemistry)
- Effect of Gate Oxide Thickness Uniformity on the Characteristics of Three-dimensional Transistors
- P-IS-45 Multiplexed liquid assay system profiling for early detection of ovarian cancer(Oncology 12,Group 99,International Session)
- The incorporation effect of thin Al_2O_3 layers on ZrO_2-Al_2O_3 nanolaminates in the composite oxide-high-K-oxide stack for the floating gate flash memory devices
- P-IS-26 Proportion of peripheral blood CD4+CD25high regulatory T cells in patients with gynecologic cancers(Oncology 7,Group 94,International Session)
- Comparative study of laparoscopic radical hysterectomy and radical abdominal hysterectomy in patients with FIGO stage IB cervical cancer(Oncology 9)
- Identification and characterization of potential serum marker, Haptoglobin-α and -β subunits, in ovarian cancer(Oncology 3)
- O-2-63 Transgastric Endoscopic Cholecystectomy of the Porcine Model
- Efficacy and Safety of the Ketogenic Diet for Intractable Childhood Epilepsy : Korean Multicentric Experience
- Neuroprotection and Enhancement of Learning and Memory by BF-7
- Erratum: Neuroprotection and Enhancement of Learning and Memory by BF-7[J. Health Sci. 51(3): 317-324 (2005)]
- Co-continuous Structure in Polycarbonate/Amorphous Nylon 3Me6T Blend
- Post-synthesis Emission Control of CdSe-ZnS Quantum Dots by Surface Oxidation through In Situ Generation of Oxidant under Mild Reaction Conditions
- Drawing Properties and Physical Properties of Ultrahigh-Molecular-Weight Polyethylene Swollen in Mixed Solvent
- Effect of the carboxyl-terminal portion of Cry1Ab in Bacillus thuringiensis on toxicity against the silkworm, Bombyx mori
- Genetic analysis of the cry1Ab gene in Bacillus thuringiensis strain AF101
- INTEGRAL MEANS OF THE FRACTIONAL DERIVATIVE OF UNIVALENT FUNCTIONS WITH NEGATIVE COEFFICIENTS
- INTEGRAL MEANS OF THE FRACTIONAL DERIVATIVE OF UNIVALENT FUNCTIONS WITH NEGATIVE COEFFICIENTS (Applications of Complex Function Theory to Differential Equations)
- FRACTIONAL CALCULUS OPERATOR AND ITS APPLICATIONS IN THE UNIVALENT FUNCTIONS (New Extension of Historical Theorems for Univalent Function Theory)
- A general approach to the Fekete-Szego problem
- Geometric Properties of Generalized Fractional Integral Operator (Study on Applications for Fractional Calculus Operators in Univalent Function Theory)
- Novel threshold voltage fine control method for FETs within a wafer using LDSi (Locally Differentiated Scanning ion implant)
- Spepwise Cyclization of Hydrazonoyl Cyanides with Isothiocyanates to 1,3,4-Thiadiazolines
- The flavonoid quercetin induces apoptosis and inhibits migration through a MAPK-dependent mechanism in osteoblasts
- Charge Assisted Deposition of Polycrystalline Silicon Thin Films by Cesium Sputter Ion Beam Deposition
- Role of Neutrophils in Oxidized LDL mediated Injury of Endothelial Cells
- Primary Papillary Serous Carcinoma of the Peritoneum Diagnosed by Video-Assisted Thoracoscopic Surgery : Report of a Case
- Tumor Volume Change during Neoadjuvant Chemotherapy in Locally Advanced Cervical Cancer : Predictive Value of Recurrence(Oncology 9)
- Antimalarial Activity of Lavandulyl Flavanones Isolated from the Roots of Sophora flavescens (Pharmacognosy)
- Antimicrobial Characteristics of Chitosans against Food Spoilage Microorganisms in Liquid Media and Mayonnaise(Food & Nutrition Science)
- O-1-194 Cost Effectiveness of Laparoscopic Appendectomy in Korean Academic Hospital
- Analysis of Cell Configuration Effects on Nuclear Characteristics in a Lead-Bismuth Cooled Core for TRU Incineration
- Influence of Thickness on the Emission Threshold Field of the Pb(Zr_Ti)O_3(PZT)Films : Electrical Properties of Condensed Matter
- P-2-680 Colon Liposarcoma Presenting as Hemoperitoneum A casereport and review of literature
- Extrarenal teratoid Wilms' tumor : Two cases in unusual locations, one associated with elevated serum AFP
- Microsatellite instability in young patients with colorectal cancer
- ISO-4 Criteria for the Safety of Less Radical Trachelectomy in Early-stage Cervical Cancer : a Multi-center Study(Group1 Oncology,International Session : Oral Presentation)
- Shear-Induced Modulated Structure in Blend of Polycarbonate/Nylon6-co-12 random Copolymer
- A Single to Multi-Wavelength Converter Using Fabry-Perot Laser Diode with Linear Optical Amplifier
- Characteristics and the Model of Resistive Random Access Memory Switching of the Ti/TiO2 Resistive Material Depending on the Thickness of Ti
- Evolution of Linear Moduli and Remanent State Variables during Polarization Reversal in a Lead Zirconate Titanate Wafer at Various Temperatures
- The histologic and biomechanical comparative analysis of bone ingrowth effect of porous hydroxyapatite impregnated bone cement implanted in distal femur of rabbit
- IS-25 Concurrent Chemo-radiation is an Optimal Treatment for Improving Survival in FIGO Stage IVB Cervical Cancer(Group3 Oncology3,International Session)
- Nonleukemic granulocytic sarcoma presenting as intussusception of small bowel
- Comparative Studies on Various Room-Temperature Vulcanizing-Type Silicone Rubbers as Ion-Selective Elcetrode Matrices
- Cloning and Expression of the nifA Gene of Klebsiella oxytoca in K. pneumoniae and Azospirillum lipoferum(Microbiology & Fermentation Industry)
- ILI-5 Potent Neurotoxin of Chiriquitoxin and Zetekitoxin from the Panamanian Golden Frogs Atelopus Species(Isolation and Structure Elucidation of Natural Products)
- L-Trp and L-Leu-OEt Derivatives of the Monascus Pigment Exert High Anti-Obesity Effects on Mice
- p53, p16 and RB Expression in Adenosquamous and Squamous Cell Carcinomas of the Stomach
- Convenient One-Pot Synthesis of Sulfonyl Chlorides from Thiols Using Sulfuryl Chloride and Metal Nitrate
- Dependence of Gate Interfacial Resistance on the Formation of Insulative Boron–Nitride for p-Channel Metal–Oxide–Semiconductor Field-Effect Transistor in Tungsten Dual Polygate Memory Devices
- No association between AKT1 polymorphism and schizophrenia : A case-control study in a Korean population and a meta-analysis
- BR-P4 Enzyme-catalyzed synthesis of enantiospecific RR-lactide from alkyl lactate using Novozym 435(Section IV Biorefinery)
- Luminescence from the Thermally Treated Cerium Oxide on Silicon
- Pyrazolato- and 3,5-Dimethylpyrazolato-Bridged Dinuclear Platinum(II), Palladium(II), and Their Mixed-Metal Complexes of 2,2'-Bipyrimidine. Syntheses, Structures, and Luminescent Properties
- Enhanced Secretion of Peroxidase from Carrot Hairy Roots Using Polyethylene Glycol
- Test Experiment for Time-Reversal Symmetry Breaking Superconductivity
- Influence of Kinesio Taping on the Motor Neuron Conduction Velocity
- Mesenteric Involvement of Acute-Stage Buerger's Disease as the Initial Clinical Manifestation : Report of a Case
- P-2-88 A case of liver & peritoneal metastastic gastric cancer controlled by TS-1 plus RFA
- Prodomain Processing of Recombinant Plasmepsin II and IV, the Aspartic Proteases of Plasmodium falciparum, Is Auto- and Trans-Catalytic
- Genetic Structure and Conservation Considerations of Rare Endemic Abeliophyllum distichum Nakai (Oleaceae) in Korea
- Capsule Wrinkling During Capsulorhexis in Patients with Primary Angle-Closure Glaucoma and Cataract
- Changes in cerebral glucose metabolism in patients with posttraumatic cognitive impairment after memantine therapy : a preliminary study
- A Glucose Sensor Fabricated by Piezoelectric Inkjet Printing of Conducting Polymers and Bienzymes
- Sialic Acid in Milk. : Ⅲ. Sialic Acid in Normal Milk and in the Fractions of Milk Proteins obtained by Diethylaminoethyl-cellulose Column
- 特別講演 Changing Needs and New Perspectives for Psychiatry and Mental Health Services in Korea (第102回日本精神神経学会総会)
- A CERTAIN SUBCLASS OF ANALYTIC FUNCTIONS WITH NEGATIVE COEFFICIENTS FOR OPERATORS ON HILBERT SPACE
- Novel Synthesis of 5-Phenyliodonium Triflate Substituted Uracil Nucleosides
- EP-P15 Rational redesign of Candida antarctica lipase B for SS-lactide formation to produce enantiopure polylactic acid (PLA)(Section VII Enzyme and Protein Engineering)
- Incorporation Effect of Thin Al2O3 Layers on ZrO2–Al2O3 Nanolaminates in a Composite Oxide–High-$\kappa$-Oxide Stack for Floating-Gate Flash Memory Devices