Charge Assisted Deposition of Polycrystalline Silicon Thin Films by Cesium Sputter Ion Beam Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-10-15
著者
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KIM Yong
Department of Metallurgy and Materials Science, Hanyang University
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KIM In
Department of Radiation Oncology, Seoul National University College of Medicine
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JEONG Soon
Department of Organic and Polymeric Materials, Tokyo Institute of Technology
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KOO Won
Department of Organic and Polymeric Materials, Tokyo Institute of Technology
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Kim In
Department Of Animal Resource And Sciences Dankook University
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Koo Won
Department Of Metallurgical System Engineering Yonsei University
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Baik H
Yonsei Univ. Seoul Kor
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Baik Hong
Department Of Metallurgical Engineering Yonsei University
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CHOI Dong
Department of Ophthalmology, Hallym University
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Choi D
Department Of Metallurgical System Engineering Yonsei University
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Lee Seong
Department Of Materials Science And Engineering Incheon University
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Lee Seong
Department Of Advanced Materials Engineering Korea Polytechnic University
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LEE Deuk
Department of Metallurgical System Engineering, Yonsei University
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Jeong Soon
Department Of Metallurgical System Engineering Yonsei University
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Lee Deuk
Department Of Metallurgical System Engineering Yonsei University
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Lee Deuk
Department Of Dermatology Asan Medical Center University Of Ulsan College Of Medicine
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Choi Dong
Department Of Biotechnology Graduate School Of Engineering Osaka University
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Jeong Soon
Department Of Chemical Engineering Korea University
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Jeong Se
School Of Electrical And Computer Engineering Sungkyunkwan University
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Kim Yong
Department Of Metallurgical System Engineering Yonsei University
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Baik Hong
Department Of Materials Engineering College Of Engineering Yonsei University
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Kim Yong
Department And Research Institute Of Rehabilitation Medicine Yonsei University College Of Medicine
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Choi Dong
Department Of Biological Education Chonnam National University
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Kim In
Department Of Metallurgical System Engineering Yonsei University
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Baik Hong
Department of Advanced Materials Engineering, Yonsei University, Seoul 120-749, Korea
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Koo Won
Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-dong, Seodaemun-gu, Seoul 120-749, Korea
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