Platinum Bottom Electrodes Formed by Electron-Beam Evaporation for High-Dielectric Thin Films
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概要
- 論文の詳細を見る
Platinum (Pt) bottom electrodes have been prepared on SiO_2/Si substrates at various deposition temperatures by electron-beam evaporation. Subsequently, (Ba_<0.5>Sr_<0.5>)TiO_3 (BST) films were grown under identical conditions by rf magnetron sputtering. It was found that the crystallinity of BST thin films on the Pt bottom layers was strongly dependent on that of Pt films. The surface morphology of BST films appeared to be closely related to the change in the stress of Pt films during BST deposition. In addition, the stress of Pt film has been proven to affect the electrical properties such as current-voltage characteristic and capacitance-voltage characteristic.
- 社団法人応用物理学会の論文
- 1995-09-30
著者
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LEE Hee
Department of Pharmacology, College of Medicine, Kohwang Medical Research Institute, Kyung Hee Unive
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Lee Won
Department of Internal Medicine, institute of Medical Research, Sungkyunkwan University School of Me
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KIM Ho
Department of Neurosurgery, Division of Biostatistics in Graduate School of Public Health University
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Lee Hee
Department Of Chemistry Pohang University Of Science And Technology
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Lee Won
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Cha Seon
Department Of Electrical Engineering Korea Advanced Institute Of Science And Technology
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Kim Ho
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Lee Won
Department Of Agricultural And Biological Engineering University Of Florida
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Kim Ho
Department Of Dermatology Kyungpook National University School Of Medicine
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Kim Ho
Department Of Biostatistics And Epidemiology School Of Public Health & Institute Of Health And E
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Lee Hee
Department Of Anesthesiology And Pain Medicine Hanyang University College Of Medicine
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Cha Seon
Department of Advanced Materials Science and Engineering, Sungkyunkwan University, Suwon 440-746, Korea
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