Formation of a Lead Zirconate Titanate(PZT)/Pt Interfacial Layer and Structural Changes in the Pt/Ti/SiO_2/Si Substrate during the Deposition of PZT Thin Film by Electron Cyclotron Resonance Plasma-Enhanced Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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Kim Jae
Department of Anatomy, College of Medicine, Pusan National University
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Lee Won
Department of Internal Medicine, institute of Medical Research, Sungkyunkwan University School of Me
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Lee Won
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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PARK Chong
Department of Nano Science and Technology, Sungkyunkwan University
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Chung Su-ock
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Kim J
Korea Res. Inst. Biosci. And Biotechnol. Taejon Kor
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KIM Geun
Agency for Defense Development
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Lee Won
Department Of Agricultural And Biological Engineering University Of Florida
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Park Chong
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Kim Jae
Department Of Anatomy College Of Medicine Pusan National University
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Kim Jae
Deparment of Obstetrics and Gynecology, Seoul National University Collge of Medicine
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