Layout Dependent Induced Leakage and its Prevention with Different Shallow Trench Isolation Schemes in 0.18μm Dual Gate Complementary Metal Oxide Semiconductor Technology
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-01-15
著者
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Kim Jae
Department of Anatomy, College of Medicine, Pusan National University
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KIM Dae
Department of Anatomy and Center for Advanced Medical Education by BK21 Project, Inha University Col
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Kim Dae
Department Of System Ic R&d Magnachip Semiconductor Ltd.
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Jeong Yang
Department Of Electrical And Semiconductor Engineering Chonnam National University
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Jeong Y
Boe-hydis Co. Ltd. Kyungki‐do Kor
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Huh Sang
Process Engineering Dept. 5 Magnachip Semiconductor Ltd.
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KANG Seong
Department of Veterinary Surgery, College of Veterinary Medicine and Veterinary Medical Research Cen
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MUN Seong
Process Engineering Dept. 5, MagnaChip Semiconductor Ltd.
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SHIN Kyeong
Process Engineering Dept. 5, MagnaChip Semiconductor Ltd.
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JU Je
Department of System IC R&D, Magnachip Semiconductor Ltd.
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Mun Seong
Process Engineering Dept. 5 Magnachip Semiconductor Ltd.
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Ju Je
Department Of System Ic R&d Magnachip Semiconductor Ltd.
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