Ellipsometry analysis of hydrogenated HgCdTe(Session A9 Optelectronic Devices)(2004 Asia-Pasific Workshop on Fundamentals and Application of Advanced Semiconductor Devices (AWAD 2004))
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概要
- 論文の詳細を見る
The hydrogenation process using inductively coupled plasma for mercury cadmium telluride (HgCdTe) infrared photodiode fabrication is developed as junction formation process. The hydrogenation is simple, reproducible, and damage-free process in comparison with ion implantation process. However, atomic hydrogen etches mercury in HgCdTe, so hydrogenation process may produce roughened surface and variations in composition. In this paper, spectroscopic ellipsometry technique is introduced to analyze hydrogenated HgCdTe wafer surface. Bruggeman effective-medium approximation method was used for modeling the hydrogenated HgCdTe surface as two-component layers containing HgCdTe, CdTe, and void. The result shows that chemical etching occurred during the hydrogenation process.
- 社団法人電子情報通信学会の論文
- 2004-06-25
著者
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Kim Young
Department Of Electronics Engineering Korea Advance Intitute Of Science & Technology
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LEE Hee
Department of Pharmacology, College of Medicine, Kohwang Medical Research Institute, Kyung Hee Unive
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Lee Hee
Department Of Chemistry Pohang University Of Science And Technology
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Lee H
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Kim Young
Department Of Agricultural Chemistry The University Of Tokyo
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Kim Young
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Kim Y
Korea University
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Lee H
Department Of Eecs Korea Advanced Institute Of Science And Technology
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Yang Keedong
i3system Company
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YANG Keedong
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and T
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Yang Keedong
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Lee Hee
Department Of Anesthesiology And Pain Medicine Hanyang University College Of Medicine
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