Annealing of RuO_2 and Ru Bottom Electrodes and Its Effects on the Electrical Properties of (Ba,Sr)TiO_3 Thin Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-01-15

著者

• Lee Won-jae

  Electronics And Telecommunications Research Institute

• Kim H‐g

  Korea Advanced Inst. Sci. And Technol. Taejon Kor

• CHOI Won-Youl

  Department of Materials Engineering, Korea Advanced Institute of Science and Technology

• KIM Ho-Gi

  Department of Materials Engineering, Korea Advanced Institute of Science and Technology

• Lee W‐j

  Sejong Univ. Seoul Kor

• Lee Won-jae

  Electronic Ceramic Materials Research Center Korea Advanced Institute Of Science And Technology

• Choi W‐y

  Korea Advanced Inst. Sci. And Technol. Taejon Kor

• AHN Joon-Hyung

  Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology

• Ahn Joon-hyung

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Kim Ho-gi

  Department Of Ceramic Science And Engineering Korea Advanced Institute Of Science And Technology

• Choi Won-youl

  Department Of Materials Engineering Korea Advanced Institute Of Science And Technology

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• Electrical Properties of SrBi_2Ta_2O_9/Insulator/Si Structures with Various Insulators
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