Effects of the Partial Pressure of Copper(I)Hexafluoroacetylacetonate Trimethylvinylsilane on the Chemical Vapor Deposition of Copper
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-08-15
著者
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Lee Seung-yun
Department Of Anesthesiology And Pain Medicine Konkuk University Hospital
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Lee S‐y
Yonsei Univ. Seoul Kor
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Kim D‐w
Massachusetts Inst. Technol. Ma Usa
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KIM Dong-Won
Department of Electrical Engineering and Institute for Nano Science, Korea University
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Lee W‐j
Sejong Univ. Seoul Kor
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Kim Dong-won
School Of Mechanical Engineering Sungkyunkwan University
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Kim Dong-won
Department Of Advanced Materials Engineering Kyonggi University
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RHA Sa-Kyun
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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LEE Won-Jun
Advanced Technology Laboratory, LG Semicon Co., Ltd.
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HWANG Jeong-Sug
Department of Chemistry, Taejon University
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PARK Chong-Ook
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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Lee W‐j
Department Of Advanced Materials Engineering Sejong University
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Park Chong-ook
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Rha S‐k
Department Of Materials Engineering Hanbat National University
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Rha Sa-kyun
Department Of Materials Engineering Hanbat National University
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Park Chong-ook
Department Of Materials Science And Engineering Kaist
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Hwang J‐s
National Cheng Kung Univ. Taiwan Twn
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Hwang Jeong-sug
Department Of Chemistry Taejon University
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