Effects of the Deposition Conditions of the Seed Layer on the Crystallinity and Electrical Characteristics of the Pb(Zr, Ti)O_3 Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-05-15
著者
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Lee M‐y
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee M‐y
Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Myoung-bum
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim S‐t
Samsung Electronics Co. Ltd. Gyeonggi‐do Kor
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Kim Sung-tae
Semiconductor R & D Center Samsung Electronics Co. Ltd.:department Of Materials Science And Engi
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Lee W‐j
Sejong Univ. Seoul Kor
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Lee Moon-yong
Semiconductor R & D Center Samsung Electronics Co.ltd.
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Kim H‐h
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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KIM Yong-Il
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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KIM Hyun-Ho
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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LEE Won-Jong
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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Lee Moon-yong
Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee W‐j
Department Of Advanced Materials Engineering Sejong University
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Kim Y‐i
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Kim Hyun-ho
Department Of Materials Science And Engineering Kaist
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Lee Won-jong
Department Of Computer Science Yonsei University
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Kim Yong-il
Department Of General Medicine & Clinical Epidemiology Kyoto University Hospital Kyoto Universit
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