Electrical Properties of Ru/Ta_2O_5/Ru Capacitor for 1 Giga-Scale DRAMs and Beyond
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概要
- 論文の詳細を見る
- 1999-09-20
著者
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Kim Wan-don
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee M‐y
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee M‐y
Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Myoung-bum
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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NAM Sang-Don
Process Development Thani, Semiconductor R&D Division, Sam suns Uectronics Co., Ltd.
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YOO Cha-Young
Process Development Team, Semiconductor R&D Division, Samsung Electronics Co., Ltd.
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Yoo C‐y
Samsung Electronics Co. Ltd. Gyeonggi‐do Kor
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KIM Jin-Won
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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LEE Seung-Hwan
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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WON Seok-Jun
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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PARK Young-Wook
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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LEE Sang-In
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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LEE Moon-Yong
Process Development Team, Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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Lee S‐i
Process Development Team Semiconductor R&d Center Samsung Electronics
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Kim J‐w
Hoseo Univ. Chungnam Kor
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Nam Sang-don
Process Development Team Semiconductor R&d Division Samsung Electronics Co. Ltd.
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Lee Moon-yong
Semiconductor R & D Center Samsung Electronics Co.ltd.
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Lee Sang-in
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee S
Ajou Univ. Suwon Kor
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Lee Sang-in
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Sang-in
Memory Business Division Samsung Electronics Inc.
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Lee Moon-yong
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Soo
Process Development Team Semiconductor R&d Center Samsung Electronics
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Park Young-wook
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Yoo Cha-young
Process Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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Won Seok-jun
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim Jin-won
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim Jin-won
Department Of Metallurgical Engineering Seoul National University
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Lee Sang-in
Process Development Team Semiconductor R&d Center Samsung Electronics
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Lee Seung-Hwan
Process Development Team, Semiconductor R&D center, Samsung Electronics
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