A New, Low-Thermal-Budget Planarization Scheme for Pre-Metal Dielectric Using Electron-Beam Cured Hydrogen Silsesquioxane in Device
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-07-15
著者
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Lee Moon
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team
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Lee M
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee Sang-In
Semiconductor R&D Center, Samsung Electronics Co. Ltd.
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Kim S‐h
Samsung Electronics Co. Ltd Kyungki‐do Kor
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Lee Moon
Semiconductor R&d Center Samsung Electronics Co. Ltd
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Lee S‐i
Process Development Team Semiconductor R&d Center Samsung Electronics
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Lee Sang-in
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee S
Ajou Univ. Suwon Kor
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Lee Sang-in
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Sang-in
Memory Business Division Samsung Electronics Inc.
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Lee Sang-in
Semiconductor R & D Center Samsung Electronics Co. Ltd.
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LEE Hae-Jeong
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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GOO Juseon
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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KIM Seong-Ho
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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HONG Jin-Gi
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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LEE Hyeon-Deok
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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KANG Ho-Kyu
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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Hong Jin-gi
Process Development Team Semiconductor R&d Center Samsung Electronics
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Lee H‐d
Korea Res. Inst. Standards And Sci. Taejon Kor
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Lee Moon
Semiconductor R&d Samsung Electronics Co. Ltd.
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Lee Moon
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang H‐k
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Kang Ho-kyu
Process Development Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team 2
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Kang Ho-kyu
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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Lee Soo
Process Development Team Semiconductor R&d Center Samsung Electronics
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Kim S‐h
Division Of Ceramics Korea Institute Of Science And Technology
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Lee Hae-jeong
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Goo Juseon
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Co.
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Lee H‐j
Process Development Team Semiconductor R&d Center Samsung Electronics
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Kim Seong-Ho
Semiconductor R&D Center, Samsung Electronics Co., Ltd.
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