The Formation of High Temperature Stable Co-Silicide from Co_<1-x>Ta_x/Si Systems
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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Choi Hyo-jick
Department Of Ceramic Engineering Yonsei University
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KANG Ho-Kyu
Process Development Team, Semiconductor R&D Division, Samsung Electronics Co.
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Choi Siyoung
Process Development Team, Memory Division, Semiconductor Business, Samsung Electronics Co., Ltd.
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Ko Dae-hong
Department Of Ceramic Engineering Yonsei University
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Oh Sang-ho
Pohang University Of Science And Technology (postech)
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LEE Deok-Hyung
Department of Ceramic Engineering, Yonsei University
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KU Ja-Hum
Process Development Team Semiconductor R&D Division, Samsung Electronics Ltd.
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FUJIHARA Kazuyuki
Process Development Team Semiconductor R&D Division, Samsung Electronics Ltd.
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PARK Chan-Gyung
Pohang University of Science and Technology (POSTECH)
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LEE Hoo-Jeung
Stanford University
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Kang H‐k
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Kang Ho-kyu
Process Development Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team 2
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Kang Ho-kyu
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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Ku Ja-hum
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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Lee Deok-hyung
Department Of Ceramic Engineering Yonsei University
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Choi S
Samsung Electronics Co. Ltd. Kyunggi‐do Kor
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Choi Siyoung
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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Choi Siyoung
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Co.
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Fujihara Kazuyuki
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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FUJIHARA Kazuyuki
Process Development Team Semiconductor R&D Division, Samsung Electronics Ltd.
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Choi Siyoung
Process Development Team, Semiconductor R&D Center, Memory Division, Samsung Electronics Co.
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KU Ja-Hum
Process Development Team Semiconductor R&D Division Samsung Electronics Co.
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FUJIHARA Kazuyuki
Process Development Team Semiconductor R&D Division Samsung Electronics Co.
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