Application of PECVD-WNx Electrode for Ta_2O_5 Capacitor
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概要
- 論文の詳細を見る
PECVD-WNx films have been developed for the upper elatrode of Ta_2O_5 capacitor in ULSI DRAMs. In this paper, the electrical characterization of PECVD-WNx/Poly-Si electrode was performed in a cylinderically shaped structure. Cell capacitance of PECVD-WNx electrode is a little lower than that of TiN electrode, which is probably owing to the reaction between Ta_2O_5 and WNx during subsequent process of high temperature. However, in an aspect of cell leakage current, WNx electrode shows lower value by an order of magnitude than PVD-TiN electrode. This lower leakage current is attributed to the better comformality of PECVD-WNx electrode compared to PVD-TiN, which is confirmed by TEM micrographs. It is demonstrated that PECVD-WNx can be a good upper electrode in complicated Ta_2O_5 capacitor storage nodes of ULSI DRAMs.
- 社団法人電子情報通信学会の論文
- 1997-07-25
著者
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Lee M‐y
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee M‐y
Semiconductor R & D Center Samsung Electronics Co. Ltd.
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Lee Myoung-bum
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee Moon-yong
Semiconductor R & D Center Samsung Electronics Co.ltd.
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Lee H‐d
Korea Res. Inst. Standards And Sci. Taejon Kor
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Kang H‐k
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Kang Ho-kyu
Process Development Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team 2
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Kang Ho-kyu
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Ltd.
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Park Byung-Lyul
LS Process Development Group, Semiconductor R&D Center, Samsung Electronics Co., LTD.0
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Lee Hyeon-Deok
LS Process Development Group, Semiconductor R&D Center, Samsung Electronics Co., LTD.
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Lee Moon-Yong
LS Process Development Group, Semiconductor R&D Center, Samsung Electronics Co., LTD.
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Kang Ho-kyu
Process Development Team Semiconductor R&d Division Samsung Electronics Co.
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Lee H‐j
Process Development Team Semiconductor R&d Center Samsung Electronics
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Park Byung-lyul
Ls Process Development Group Semiconductor R&d Center Samsung Electronics Co. Ltd.0
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