Deposition Characteristics of (Ba, Sr)TiO_3 Thin Films by Liquid Source Metal-Organic Chemical Vapor Deposition at Low Substrate Temperatures
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-11-15
著者
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Cho Heung-jae
Memory R&d Division Hynix Semiconductor Inc.
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Lee Moon
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team
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Kim W
Samsung Electronics Co. Semiconductor R & D Center Memory Process Development Team
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Lee M
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee K
Etri Taejon Kor
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Lee Ki
Samsung Electronics Co. Semiconductor R & D Center Memory Process Development Team
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Lee Moon
Semiconductor R&d Center Samsung Electronics Co. Ltd
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Horii Hideki
Semiconductor R&D Center, Samsung Electronics Co.
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Kang Chang
Samsung Electronics Co. Semiconductor R & D Center Memory Process Development Team
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Hwang Cheol
Semiconductor R&d Center Samsung Electronics Co.
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Hwang Cheol
School Of Materials Science And Engineering Seoul National University
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Lee S
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Lee Sang
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd
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Lee Sang
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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KANG Chang
Semiconductor R&D Center, SAMSUNG Electronics Co.
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CHO Hag-Ju
Semiconductor R&D Center, SAMSUNG Electronics Co.
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LEE Byoung
Semiconductor R&D Center, SAMSUNG Electronics Co.
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LEE Ki-Hun
Semiconductor R&D Center, SAMSUNG Electronics Co.
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KIM Wan
Semiconductor R&D Center, SAMSUNG Electronics Co.
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Lee K
Semiconductor R&d Center Samsung Electronics Co. Ltd
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Lee S
Samsung Electronics Co. Ltd. Kyungki Kor
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HORII Hideki
Process Development Team, Memory Division, Samsung Electronics Co., Ltd.
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Lee Moon
Semiconductor R&d Samsung Electronics Co. Ltd.
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Cho Hag-ju
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd
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LEE Byoung
ASET EUV Laboratory
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Lee Byoung
Samsung Electronics Co. Semiconductor R & D Center Memory Process Development Team
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Horii Hideki
Process Development Team Memory Division Samsung Electronics Co. Ltd.
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Horii Hideki
Semiconductor R&d Center Samsung Electronics Co.
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Lee Byoung
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Chang
Samsung Electronics Co. Semiconductor R&d Center Memory Process Development Team 2
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Kim Wan
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang Chang
Semiconductor R&d Samsung Electronics Co. Ltd.
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Hwang Cheol
School of Material Science and Engineering, Seoul National University
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Lee S.I.
Semiconductor R&D Division, Samsung Electronics Co., Ltd.
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Kang Chang
Semiconductor Manufacturing Technology (SEMATECH), Austin, TX 78741, U.S.A.
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