Diffusion Barrier Characteristics of TiSix/TiN for Tungsten Dual Poly Gate in DRAM
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Cho Heung-jae
Memory R&d Division Hynix Semiconductor Inc.
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Kim Jin-woong
Memory R&d Division Hynix Semiconductor Inc.
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Cho Heung-jae
Advanced Process Team Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Lim Kwan-yong
Memory R&d Division Hynix Semiconductor Inc.
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Yang Hong-seon
Memory R&d Division Hynix Semiconductor Inc.
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KIM Jin
Memory R&D Division, Hynix Semiconductor Inc.
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Jang S‐a
Memory R&d Division Hynix Semiconductor Inc.
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Jang Se-aug
Memory R&d Division Hyundai Electronics Ind. Co. Ltd.
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Jang Se-aug
Memory R&d Division Hynix Semiconductor Inc.
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Kim Tae-yoon
Memory R&d Division Hynix Semiconductor Inc.
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Kim Yang
Department Of Material Science And Engineering Kaist
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Lee Jung-ho
Memory R&d Division Hynix Semiconductor Inc.
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SUNG Min
Memory R&D Division, Hynix Semiconductor Inc.
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LEE Seung
Memory R&D Division, Hynix Semiconductor Inc.
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KIM Yong
Memory R&D Division, Hynix Semiconductor Inc.
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JOO Moon-Sig
Memory R&D Division, Hynix Semiconductor Inc.
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LEE Ju-Hee
Memory R&D Division, Hynix Semiconductor Inc.
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PYI Seung-Ho
Memory R&D Division, Hynix Semiconductor Inc.
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Lim Kwan-yong
Advanced Process Team Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Pyi Seung-ho
Memory R&d Division Hynix Semiconductor Inc.
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Pyi Seung-ho
Memory R&d Div. Hyundai Electronics Ind. Co. Ltd.
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Joo Moon-sig
Memory R&d Division Hynix Semiconductor Inc.
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Kim Jin
Memory R&d Division Hynix Semiconductor Inc.
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Lee J‐h
Memory R&d Division Hynix Semiconductor Inc.
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Cho Hag-ju
Process Development Team Semiconductor R&d Center Samsung Electronics Co. Ltd
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Jang Se-aug
R&d Division Hynix Semiconductor Inc.
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Kim Yong
Memory R&d Division Hynix Semiconductor Inc.
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Sung Min
Memory R&d Division Hynix Semiconductor Inc.
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Lee Seung
Memory R&d Division Hynix Semiconductor Inc.
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Kim Jin
Memory Division Samsung Electronics Corporation
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Lee Ju-Hee
Memory R&D Division, Hynix Semiconductor Inc., Ichon P.O. Box 1010, Ichon-si, Kyoungki-do 467-701, Korea
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