A Neural Network Approach Based on Interference Pattern Analysis : Application to an Autoalignment Method for the Focusing Unit of NFR System
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-07-30
著者
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Yoon H‐k
Korea Advanced Inst. Of Sci. And Technol. Daejon Kor
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Lee Jung-ho
Memory R&d Division Hynix Semiconductor Inc.
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Lee J‐h
Memory R&d Division Hynix Semiconductor Inc.
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JEONG Jaehwa
NOM Laboratory, Department of Mechanical Engineering, Korea Advanced Institute of Science and Techno
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LEE Jun-Hee
NOM Laboratory, Department of Mechanical Engineering, Korea Advanced Institute of Science and Techno
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YOON Hyoung-Kil
NOM Laboratory, Department of Mechanical Engineering, Korea Advanced Institute of Science and Techno
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GWEON Dae-Gab
NOM Laboratory, Department of Mechanical Engineering, Korea Advanced Institute of Science and Techno
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OH Hyeong-Ryeol
Han-yang University
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