Fabrication of Micro Probe Beam Using MEMS Technology for New Vertical Silicon Probe Card
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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SEO Chang-Taeg
Department of Electronics, Kyungpook National University
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LEE Jong-Hyun
Department of Electronics, Kyungpook National University
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Kim Young-min
Graduate School Of Agriculture Hokkaido University
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Seo Chang-taeg
Department Of Electronics Kyungpook National University
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Lee Jung-ho
Memory R&d Division Hynix Semiconductor Inc.
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Lee Jong-hyun
Department Of Electronics Kyungpook National University
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KIM Young-Min
Special Business Division, Koreaabrasive Ind. Co., Ltd.
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YOON Ho-Cheol
Special Business Division, Koreaabrasive Ind. Co., Ltd.
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Lee J‐h
Memory R&d Division Hynix Semiconductor Inc.
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Yoon Ho-cheol
Special Business Division Koreaabrasive Ind. Co. Ltd.
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Kim Young-min
Hokkaido Univ.
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Kim Young-min
Hokkaido University
-
Kim Young-min
Special Business Division Koreaabrasive Ind. Co. Ltd.
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