Fabrication of a Based Fluidic Chip Equipped with Porous Silicon Filter and Micro-Channels
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概要
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In this paper, a new design and fabrication method for a micro electro mechanical system (MEMS)-based micro-fluidic system that includes an articulated filter with micro-channel is proposed. An anodic reaction that involves chemical etching is used to produce a porous silicon (PS) layer to be applied to a micro-fluidic filter. The micro-fluidic filter is fabricated with vertical micro-pores by an anodic reaction process using a (110) wafer. Physical etching based on a micro-sandblaster process, and wet chemical etching using either tetramethylammonium hydroxide (TMAH) or hydrofluoric, nitric, and acetic (HNA) acid solution are applied to form the micro-channels that function as an essential factor in the micro-fluidic system. These independently-fabricated filter and channel wafers are bonded using a dry film resist (DFR). The characteristics of the filter fabricated on a (100) wafer are analyzed. Moreover, the functional performances of the channels formed by different methods are compared. The proposed micro-fluidic system with porous silicon micro-filters might be applied to bio-material reaction chambers, such as polymerase chain reaction (PCR) chambers and DNA separation devices that require a filter.
- 2008-06-25
著者
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Choi Pyung
Department Of Electronics Kyungpook National University
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Shin Jang-kyoo
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology:school Of Ele
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Lee Jong-hyun
Department Of Electronics Kyungpook National University
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Shin Jang-Kyoo
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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Choi Pyung
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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Lee Jong-Hyun
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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Kong Seong
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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Kong Dae-Young
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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Eun Duk-Soo
Department of Electronics, Graduate School, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Republic of Korea
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