Characteristics of Piezoresistive Mass Flow Sensors Fabricated by Porous Silicon Micromachining

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• Kim D‐s

  School Of Electronic & Electrical Eng. Kyungpook National University

• Sim J‐h

  Korea Maritime Univ. Pusan Kor

• SHIN Jang-Kyoo

  School of Electronic and Electrical Engineering, Kyungpook National University

• LEE Jong-Hyun

  School of Electronic and Electrical Engineering, Kyungpook National University

• CHOI Pyung

  School of Electronic and Electrical Engineering, Kyungpook National University

• KIM Dong-Kwon

  School of Electronic & Electrical Engineering, Kyungpook National University

• KANG Sung-Gyu

  Microsystems laboratory, Samsung Advanced Institute of Technology

• SIM Jun-Hwan

  Deptartment of Electronics & Comnunication, Korea Maritime University

• Kim Dong-kwon

  School Of Electronic & Electrical Eng. Kyungpook National University

• Kang Sung-gyu

  Microsystems Laboratory Samsung Advanced Institute Of Technology

• Choi P

  Kyungpook National Univ. Daegu Kor

• Choi P

  Kyungpook National Univ. Taegu Kor

• Sim Jun-hwan

  Division Of Radio & Information Comm. Korea Maritime University

• Lee Jong-hyun

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Shin Jang-kyoo

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Shin Jang-kyoo

  Department Of Electrical And Electronic Engineering Toyohashi University Of Technology:school Of Ele

• Shin Jang-kyoo

  Department Of Electronics Kyungpook National University

• Kim D‐k

  Kyungpook National Univ. Taegu Kor

• Choi Pyung

  School Of Electronic & Electrical Eng. Kyungpook National University

• Lee Jong-hyun

  Bio-chip Project Team Samsung Advanced Institute Of Technology

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