Fabrication of a Silicon Micro-Probe for Vertical Probe Card Application

スポンサーリンク

概要

• 論文の詳細を見る

• We report on the fabrication of a new type of probe card that uses a porous silicon micromachining technique. Curled cantilever tips are fabricated using surface tension and the difference in the thermal expansion coefficient between the films. The contact resistance of cantilever tips with an aluminum pad is basically below 1 Ω and there is no change of contact resistance after 700,000 contacts.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 1998-12-30

著者

• Sim Jun-hwan

  Dept. Of Electronics & Communication Eng. Korea Maritime University

• Lee Jong-hyun

  School Of Electrical Engineering And Computer Science Kyungpook National University

• KIM Yong-Dae

  R&D Engineering Dep., Lumsonic Co. Ltd

• NAM Jae-Woo

  R&D Engineering Dep., Lumsonic Co. Ltd

• Nam Jae-Woo

  R&D Engineering Dep., Lumsonic Co. Ltd, Koyang 411-360, Korea

• Kim Yong-Dae

  R&D Engineering Dep., Lumsonic Co. Ltd, Koyang 411-360, Korea

• Sim Jun-Hwan

  Dept. of Electronics & Communication Eng., Korea Maritime University, Pusan 702-701, Korea

• Lee Jong-Hyun

  School of Electronic & Electrical Eng., Kyunpook National University, Taegu 702-701, Korea

関連論文

• Detection of Streptavidin-Biotin Protein Complexes Using Three-Dimensional MOSFET in the Si Micro-Fluidic Channel
• 3.3V 35mW Second-Order Three-Bit Quadrature Band-Pass ΔΣ Modulator for Digital Radio(Analog Signal Processing)
• 3.3V 35mW Second-Order Three-Bit Quadrature Band-Pass △Σ Modulator for Digital Radio
• Fabrication of Thick Silicon Dioxide Air-Bridge for RF Application Using Micromachining Technology
• Characteristics of Piezoresistive Mass Flow Sensors Fabricated by Porous Silicon Micromachining
• Characterization of 10μm Thick Porous Silicon Dioxide Obtained by Complex Oxidation Process for RF Application(Semiconductor Materials and Devices)
• Fabrication of Cantilever-Bump Type Si Probe Card
• 実験感染犬における犬ジステンパーウイルス早期検出のための組織および体液試料の比較(短報)(内科学)
• Fabrication of a Silicon Micro-Probe for Vertical Probe Card Application
• Design and Fabrication of a Micro Electro Mechanical Systems-Based Electrolytic Tilt Sensor
• Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass
• Fabrication of Three-Dimensional Cu Coaxial Cable Using Porous Silicon Technology
• Fabrication of a Separation by Implantation of Oxygen Silicon Nano-Gap Using Thin Film Stress
• A Piezoresistive Silicon Accelerometer Using Porous Silicon Micromachining and Flip-Chip Bonding
• Fabrication of 3-Dimensional Structure of Metal Oxide Semiconductor Field Effect Transistor Embodied in the Convex Corner of the Silicon Micro-Fluidic Channel
• Fabrication and Characteristics of a Field Effect Transistor-Type Charge Sensor for Detecting Deoxyribonucleic Acid Sequence
• Characteristics and Modeling of a Nonplanar Nonrectangular Metal Oxide Semiconductor Field Effect Transistor for Charge Sensing in the Si Micro-Fluidic Channel
• Field Effect Transistor-based Bimolecular Sensor Employing a Pt Reference Electrode for the Detection of Deoxyribonucleic Acid Sequence
• Formation of Low-Resistivity Nickel Silicide with High Temperature Stability from Atomic-Layer-Deposited Nickel Thin Film
• Fabrication of a Microbiochemical Reactor with Thick Thermal Isolation Layer and Integrated Pt Heater/Sensor in the Microwell
• Fabrication of a Silicon Micro-Probe for Vertical Probe Card Application

もっと見る 閉じる

スポンサーリンク