Fabrication of a Microbiochemical Reactor with Thick Thermal Isolation Layer and Integrated Pt Heater/Sensor in the Microwell

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概要

• 論文の詳細を見る

• We have fabricated a microbiochemical reactor with integrated heater and sensor in the microwell, which is the unlike conventional micromachined biochemical reactors which have an integrated heater and sensor on the backside of the wafer. In order to pattern heater and sensor inside the well, a thick negative Su-8 photo- resist (PR) was used. As a desirable thermal isolation layer at the bottom of the well, we proposed a thick silicon dioxide layer using porous silicon. The temperature distribution in the well for various heater shapes and the effect of the thermal isolation layer was investigated by simulation. Because of the thick thermal isolation layer and Pt heater in the well, we can expect low power consumption and less heat dissipation to the silicon substrate, which is a good thermal conductor, and real-time sensing of reagent.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-06-15

著者

• CHOI Hoon-Sung

  School of Electronic & Electrical Engineering, Kyungpook National University

• SEO Chang-Taeg

  School of Electronic & Electrical Engineering, Kyungpook National University

• Lee Jong-hyun

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Shin Jang-kyoo

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Choi Pyung

  School Of Electronic & Electrical Eng. Kyungpook National University

• Shin Jang-Kyoo

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Choi Pyung

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Lee Jong-Hyun

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Seo Chang-Taeg

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Eun Duk-Soo

  School of Electronic & Electrical Eng., Kyungpook National University, 1370 Sankyuk-Dong, Buk-Ku, Daegu 702-701, Korea

• Eun Duk-Soo

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Choi Hoon-Sung

  School of Electronic & Electrical Engneering, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

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