Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass

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概要

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• The use of a thin film or a planar multijunction thermal converter (PMJTC) for the ac-dc transfer of voltage and current is well established. In general, a three dimensional multijunction thermal converter (MJTC) has the advantage of accuracy and a single junction thermal converter (SJTC) has that of low cost. PMJTCs provide a long-term stability, a high sensitivity and a high-dynamic-frequency range. It is well known that PMJTCs show small ac-dc voltage transfer differences in the audiofrequency range. However, it is difficult to obtain a small ac-dc transfer difference at low frequencies, particularly with thin-film-based thermal converters. The small ac-dc transfer difference at low frequencies is caused by nonlinearities in the heat transport mechanism (in thin films) and in the thermal-to-electric conversion process (in the thermocouples of thin films). This study has been conducteded to achieve a smaller ac-dc transfer difference on thin-film chromel-alumel thermal converters operating at low frequencies. An optional silicon obelisk is formed underneath the thin membrane to minimize ac-dc transfer differences at lower frequencies. The floating obelisk structure enhances the isothermal operation and slows thermal transfer compared with the standard configuration without the obelisk, resulting in a smaller ac-dc transfer difference at low frequencies. Also, it is possible that thin-film thermal converters can be used as the flow sensor and infrared sensor.

• 2005-07-15

著者

• KIM Do-Wook

  School of Electronic and Electrical Engineering, Kyungpook National University

• Lee Jong-hyun

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Shin Jang-kyoo

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Jung Su-lack

  School Of Electronic And Electrical Engineering Kyungpook National University

• Kong Seong-ho

  School Of Electrical Engineering & Computer Science Kyungpook National University

• Lee Jung-Hee

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Lee Jong-Hyun

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Kong Seong-Ho

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Jung Su-Lack

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Kim Do-Wook

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Eun Duk-Soo

  School of Electronic and Electrical Engineering, Kyungpook National University, 1370, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Republic of Korea

• Eun Duk-Soo

  School of Electronic & Electrical Eng., Kyungpook National University, 1370 Sankyuk-Dong, Buk-Ku, Daegu 702-701, Korea

• Lee Jung-Hee

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

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