Negative Bias Temperature Instability of Bulk Fin Field Effect Transistor

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概要

• 論文の詳細を見る

• We investigated the negative bias temperature instability (NBTI) of bulk fin field effect transistor (FinFET) for the first time. Because bulk FinFET has a body terminal, it is more flexible in studying NBTI characteristics than a silicon on insulator (SOI) FinFET (no body terminal). The dependence of NBTI on back bias is smaller in 100 nm bulk FinFET with a fin width of 30 nm than in conventional planar channel devices. The bulk FinFET with the side surface orientation of (100) showed better NBTI than the device with the orientation of (110). The fin width variation has little impact on the NBTI of bulk FinFET. Moreover, the device with longer channel showed less degradation.

• 2006-03-15

著者

• Choi Byung-kil

  School Of Electrical Engineering And Computer Science Kyungpook National Univ.

• Lee Jae-sung

  Division Of Information & Communication Engineering Uiduk University

• Kong Seong-ho

  School Of Electrical Engineering & Computer Science Kyungpook National University

• Han Kyoung-rok

  School Of Electrical Engineering And Computer Science Kyungpook National Univ.

• Lee Jong-ho

  School Of Eecs Engineering Kyungpook National University

• Choi Byung-Kil

  School of Electronic and Electrical Engineering, Kyungpook National University, Bldg. #11-503, 1370 Sankyuk-Dong, Buk-Gu, Daegu 702-701, Korea

• Kim Sang-Yun

  School of Electronic and Electrical Engineering, Kyungpook National University, Bldg. #11-503, 1370 Sankyuk-Dong, Buk-Gu, Daegu 702-701, Korea

• Kim Sang-Yun

  School of Electrical Engineering and Computer Science, Kyungpook National University, Sankyuk-Dong, Buk-Gu, Daegu 702-701, Korea

• Kong Seong-Ho

  School of Electronic and Electrical Engineering, Kyungpook National University, Bldg. #11-503, 1370 Sankyuk-Dong, Buk-Gu, Daegu 702-701, Korea

• Han Kyoung-Rok

  School of Electronic and Electrical Engineering, Kyungpook National University, Bldg. #11-503, 1370 Sankyuk-Dong, Buk-Gu, Daegu 702-701, Korea

• Lee Jae-Sung

  Division of Information and Communication Engineering, Uiduk University, San 50, Gyongju 780-713, Korea

• Lee Jong-Ho

  School of EECS and ISRC, Seoul National University, Seoul 151-742, Korea

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