Study of IC Compatible On-Chip Thermoelectric Coolers

スポンサーリンク

概要

• 論文の詳細を見る

• A thin-film-based thermoelectric micro-cooler has been studied and realized using the standard integrated circuit (IC) fabrication technology and bulk micromachining technology in sequence. The whole fabrication process is kept IC compatible by postponing potassium hydroxide (KOH) etching step to the last part of the fabrication sequence. Considering the fabrication compatibility, polycrystalline silicon germanium (polySiGe) is chosen as thermoelectric material even though bismuth telluride (Bi2Te3) is one of the most effective thermoelectric materials. The influence of non-idealities on device performance, such as Joule heating due to contact resistance and parasitic heat loss through supporting membrane, is analyzed. The characterized thermoelectric, thermal and electric properties of the fabricated polySiGe thermoelectric material correspond well to those from literatures. Measured cooling performance demonstrates that an on-chip micro-cooler can be applied for thermal stabilization near ambient temperature.

• 公益社団法人 応用物理学会の論文
• 2005-07-15

著者

• Kong Seong-ho

  School Of Electrical Engineering & Computer Science Kyungpook National University

• Kong Seong-Ho

  School of Electrical Engineering & Computer Science, Kyungpook National University, Sangyuk-dong 1370, buk-gu, Daegu 702-701, South-Korea

• Wijngaards Davey

  Electronic Instrumentation Laboratory, ITS/Et, Delft University of Technology, Mekelweg 4, NL-2628 CD Delft, The Netherlands

• Wolffenbuttel Reinoud

  Electronic Instrumentation Laboratory, ITS/Et, Delft University of Technology, Mekelweg 4, NL-2628 CD Delft, The Netherlands

関連論文

• Detection of Streptavidin-Biotin Protein Complexes Using Three-Dimensional MOSFET in the Si Micro-Fluidic Channel
• Negative Bias Temperature Instability of Bulk Fin Field Effect Transistor
• Fabrication of Low-Frequency AC-DC Thermal Converter with Thermal Mass
• Study of IC Compatible On-Chip Thermoelectric Coolers
• Study of IC Compatible On-Chip Thermoelectric Coolers

スポンサーリンク