Fabrication of Thick Silicon Dioxide Air-Bridge for RF Application Using Micromachining Technology
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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Sim J‐h
Korea Maritime Univ. Pusan Kor
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SHIN Jang-Kyoo
School of Electronic and Electrical Engineering, Kyungpook National University
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LEE Jong-Hyun
School of Electronic and Electrical Engineering, Kyungpook National University
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PARK Jee-Eun
Department of Sensor Engineering, Kyungpook National University
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CHOI Pyung
School of Electronic and Electrical Engineering, Kyungpook National University
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LIM Geunbae
Department of Mechanical Engineering, Pohang University of Science and Technology
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PARK Jeong-Yong
School of Electronic & Electrical Engineering, Kyungpook National University
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SIM Jun-Hwan
Division of Radio & information Comm., Korea Maritime University
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LIM Geunbae
Samsung Advanced Institute of Technology
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Choi P
Kyungpook National Univ. Daegu Kor
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Choi P
Kyungpook National Univ. Taegu Kor
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Sim Jun-hwan
Division Of Radio & Information Comm. Korea Maritime University
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Lee Jong-hyun
School Of Electrical Engineering And Computer Science Kyungpook National University
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Shin Jang-kyoo
School Of Electrical Engineering And Computer Science Kyungpook National University
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Shin Jang-kyoo
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology:school Of Ele
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Shin Jang-kyoo
Department Of Electronics Kyungpook National University
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Choi Pyung
School Of Electronic & Electrical Eng. Kyungpook National University
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Lim Geunbae
Department Of Mechanical Engineering Pohang University Of Science And Technology
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Park Jeong-yong
School Of Electrical Engineering And Computer Science Kyungpook National University
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Park Jeong-yong
School Of Electronic & Electrical Engineering Kyungpook National University
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Lee Jong-hyun
Bio-chip Project Team Samsung Advanced Institute Of Technology
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