A Novel Comb-Type Differential Pressure Sensor with Silicon Beams Embedded in a Silicone Rubber Membrane
スポンサーリンク
概要
- 論文の詳細を見る
A novel differential pressure sensor has been developed with silicon beams embedded in a silicone rubber membrane. The transducer is usable for most applications involving exposure to harsh media. A piezoresistive differential pressure sensor using silicone rubber membrane has been fabricated on the selectively diffused (100)-oriented n/n+/n silicon substrates by a unique silicon micro-machining technique using porous silicon etching. The pressure sensitivity is about 4.75 mV/kPa and the non-linearity is less than 1.05% FS (full scale).
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
-
Seo Chang-taeg
Department Of Electronics Kyungpook National University
-
Shin Jang-kyoo
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology:school Of Ele
-
Lee Jong-hyun
Department Of Electronics Kyungpook National University
-
Kim Young-min
Department Of Biology College Of Life Science And Biotechnology Yonsei University
-
Lee Jong-Hyun
Department of Electronics, Kyungpook National University, 1370 Sankyuk-dong, Buk-ku, Daegu 702-701, Korea
-
Seo Chang-Taeg
Department of Electronics, Kyungpook National University, 1370 Sankyuk-dong, Buk-ku, Daegu 702-701, Korea
-
Kim Young-Min
Department of Electronics, Kyungpook National University, 1370 Sankyuk-dong, Buk-ku, Daegu 702-701, Korea
関連論文
- A Bio-Inspired 128 × 128 Complementary Metal-Oxide-Semiconductor Vision Chip for Edge Detection with Signal Processing Circuit Separated from Photo-Sensing Circuit
- Detection of Streptavidin-Biotin Protein Complexes Using Three-Dimensional MOSFET in the Si Micro-Fluidic Channel
- A Complementary Metal-Oxide-Semiconductor Vision Chip for Edge and Motion Detection with a Function for Output Offset Cancellation
- A Novel Comb-Type Differential Pressure Sensor with Silicon Beams Embedded in a Silicone Rubber Membrane
- 3.3V 35mW Second-Order Three-Bit Quadrature Band-Pass ΔΣ Modulator for Digital Radio(Analog Signal Processing)
- 3.3V 35mW Second-Order Three-Bit Quadrature Band-Pass △Σ Modulator for Digital Radio
- Fabrication of Thick Silicon Dioxide Air-Bridge for RF Application Using Micromachining Technology
- Characteristics of Piezoresistive Mass Flow Sensors Fabricated by Porous Silicon Micromachining
- Pseudo 2-Transistor Active Pixel Sensor Using an N-well/Gate-Tied P-Channel Metal Oxide Semiconductor Field Eeffect Transistor-Type Photodetector with Built-in Transfer Gate
- Fabrication of Micro Probe Beam Using MEMS Technology for New Vertical Silicon Probe Card
- A 64 × 64 CMOS Active Pixel Sensor Operative at a Very Low Illumination Level
- Active Pixel Sensor Using a PMOSFET-Type Photodetector with a Transfer Gate for Variable Photosensitivity
- An Adaptive Silicon Retina Performing an Edge Extraction with a MOS-Type Spatial Wiring and Smart Pixel Circuits
- A Novel Optical Adaptive Neuro-Device Using a Split-Gate MOS Transistor
- A Novel Optical Adaptive Neuro-Device Using a Split-Gate MOS Transistor
- Highly and Variably Sensitive Complementary Metal Oxide Semiconductor Active Pixel Sensor Using P-Channel Metal Oxide Semiconductor Field Effect Transistor-Type Photodetector with Transfer Gate
- Plasma-Enhanced Chemical Vapor Deposition Growth of Fluorinated Amorphous Carbon Thin Films Using C4F8 and Si2H6/He for Low-Dielectric-Constant Intermetallic-Layer Dielectrics
- Cloning, expression and characterization of the catalase-peroxidase (KatG) gene from a fast-growing Mycobacterium sp. strain JC1 DSM 3803
- Fabrication of a Based Fluidic Chip Equipped with Porous Silicon Filter and Micro-Channels
- Fabrication of Circular-Type Microchannel Using Photoresist Reflow and Isotropic Etching for Microfluidic Devices
- Pathological fracture of the femoral neck as the first manifestation of osteonecrosis of the femoral head
- Erratum: “Fabrication of a Based Fluidic Chip Equipped with Porous Silicon Filter and Micro-Channels”
- Two Different Multisensors Fabricated by Various Manufacturing Methods
- Active Pixel Sensor Using a $1\times 16$ Nano-Wire Photodetector Array for Complementary Metal Oxide Semiconductor Imagers
- A Novel Comb-Type Differential Pressure Sensor with Silicon Beams Embedded in a Silicone Rubber Membrane