A Novel Comb-Type Differential Pressure Sensor with Silicon Beams Embedded in a Silicone Rubber Membrane
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
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SHIN Jang-Kyoo
Department of Electronics, Kyungpook National University
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SEO Chang-Taeg
Department of Electronics, Kyungpook National University
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LEE Jong-Hyun
Department of Electronics, Kyungpook National University
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KIM Young-Min
Department of Electronics, Kyungpook National University
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Shin Jang-kyoo
Department Of Electronics Kyungpook National University
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Lee Jung-ho
Memory R&d Division Hynix Semiconductor Inc.
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Lee Jong-hyun
Department Of Electronics Kyungpook National University
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Lee J‐h
Memory R&d Division Hynix Semiconductor Inc.
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