Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process
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概要
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In the present study, a vertically modularized and sectioned micromold system (v-MSMS) is proposed and developed by synchrotron X-ray micromachining process. The developed v-MSMS is a novel concept of constructing a micromold system by stacking several micromold modules. As one representative application of the present v-MSMS, micromold system with several kinds of spur gear patterns was fabricated using deep X-ray lithography and a subsequent nickel electroforming process. Then, the usefulness of v-MSMS was demonstrated by casting the microgear with multiple layers. The proposed technique can be a useful tool for the mass replication of multilayered mechanical components, various micro parts, complicated microstructures, and so on.
- 2011-06-25
著者
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Lim Geunbae
Department Of Mechanical Engineering Pohang University Of Science And Technology
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Kim Jong
Pohang Accelerator Laboratory (PAL), Pohang University of Science and Technology (POSTECH), Pohang, Gyeongbuk 790-784, Korea
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Chang Suk
Pohang Accelerator Laboratory (PAL), Pohang University of Science and Technology (POSTECH), Pohang, Gyeongbuk 790-784, Korea
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Lee Bong-Kee
School of Mechanical Systems Engineering, Chonnam National University, Gwangju 500-757, Korea
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