Pt/AlGaN Metal Semiconductor Ultra-Violet Photodiodes on Crack-Free AlGaN Layers

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概要

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• Schotty-type solar-blind ultra-violet photodetectors were designed and fabricated by employing an unintentionally doped AlGaN layer, grown on a sapphire substrate by metal-organic chemical vapor deposition (MOCVD). When a low-temperature grown AlGaN interlayer was inserted between the GaN and AlGaN active layers, it was found to play an important role in decreasing the thermal and lattice mismatch-induced crack density in the active AlGaN layer. The Schottky-type photodetectors fabricated on the crack-free AlGaN layer then exhibited excellent electrical characteristics and UV sensing behavior. Accordingly, the resulting Pt/AlGaN metal semiconductor photodiode had a dark current of 9 nA at $-5$ V, cut-off wavelength of 310 nm, and quantum efficiency of 65% at 280 nm, plus the UV/visible extinction ratio was ${\sim}10^{4}$ in the band edge, which is one of the highest values recorded for an AlGaN photodetector.

• 2003-04-15

著者

• Lee Jung-hee

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Kim Jung-kyu

  School Of Electrical Engineering & Computer Science Kyungpook National University

• Hahm Sung-ho

  School Of Electrical Engineering & Computer Science Kyungpook National University

• LEE Jae-Hoon

  School of Electrical Engineering & Computer Science Kyungpook National University

• LEE Young-Hyun

  School of Electrical Engineering & Computer Science Kyungpook National University

• LEE Myoung-Bok

  School of Electrical Engineering & Computer Science Kyungpook National University

• Jung Young-ro

  Department Of Sensor Engineering Kyungpook National University

• Jung Young-Ro

  Department of Sensor Engineering, Kyungpook National University, Daegu 702-701, Korea

• Lee Jae-Hoon

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

• Lee Young-Hyun

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

• Lee Myoung-Bok

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

• Lee Jung-Hee

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

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