Thermal and Electrical Properties of 5-nm-Thick TaN Film Prepared by Atomic Layer Deposition Using a Pentakis(ethylmethylamino)tantalum Precursor for Copper Metallization

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概要

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• We first report on the thermal stability and electrical properties of 5 nm-thick TaN films prepared by atomic layer deposition (ALD) using pentakis(ethylmethylamino)tantalum (PEMAT) and ammonia. The deposition rate of the ALD-TaN process was about ${\sim}0.067$ nm per cycle in a temperature range between 200 and 250 °C, which is a typical feature of ALD process. In cross sectional transmission electron microscopy (TEM) images, the deposited TaN films exhibited a very smooth and uniform interface. The thermal stabilities of these films were tested by depositing a Cu film of 200 nm thickness on a TaN layer and subsequently performing annealing for 30 min by varying the temperature from 300 to 800 °C in N2 ambient. The high and low-frequency capacitance–voltage ($C$–$V$) and breakdown characteristics of a Cu/TaN/SiO2/Si capacitor showed that the barrier properties of thin TaN films against Cu diffusion are inhibited above 500 °C, which is considerably lower than the inhibition temperature estimated by four-point probe or X-ray diffraction (XRD) measurement.

• 2006-12-15

著者

• Lee Jung-hee

  School Of Electrical Engineering And Computer Science Kyungpook National University

• Cho Hyun-ick

  School Of Electrical Engineering & Computer Science Kyungpook National University

• PARK Ki-Yeol

  School of Electrical Engineering & Computer Science, Kyungpook National University

• Na Kyoung-Il

  School of Electrical Engineering and Computer Science, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Boo Sung-Eun

  School of Electrical Engineering and Computer Science, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Bae Jeung-Ho

  Division of Information and Communication Engineering, Uidik University, Gangdong-myeon, Gyeongju, Gyeongsangbuk-Do 780-713, Korea

• Park Ki-Yeol

  School of Electrical Engineering and Computer Science, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Bae Nam-Jin

  School of Electrical Engineering and Computer Science, Kyungpook National University, 1370 Sankyuk-dong, Buk-gu, Daegu 702-701, Korea

• Lee Jung-Hee

  School of Electrical Engineering & Computer Science, Kyungpook National University, Daegu 702-701, Korea

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