Optical Properties of Thin Amorphous Silicon Film on a Phase Shift Mask for 157nm Lithography
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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Kim Sung
Department of Bioengineering and Technology, College of Engineering, Kangwon National University
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CHOI Young
Korea Institute of Nuclear Safety
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Choi Jong
Department Of Pharmacy Kyungsung University
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Kim Yang
Department Of Infectious Diseases Asan Medical Center
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Kim Yang
Department Of Material Science And Engineering Kaist
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Sung Tae-hyun
Korea Electric Power Research Institute
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HONG Jongin
Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology
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Kim S
Department Of Material Science And Engineering Kaist
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Hong Jongin
Department Of Material Science And Engineering Kaist
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SHON Jung
Samsung Electronics Co., Ltd.
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NO Kwang
Department of Material Science and Engineering, KAIST
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Choi Jong
Department Of Archaeology Kyongnam Archaeology Institute
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No Kwang
Department Of Material Science And Engineering Kaist
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Shon Jung
Samsung Electronics Co. Ltd.
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Kim Yang
Department Of Chemistry Sangji University
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Sung Tae-Hyun
Korea Electirc Power Research Institute, Taejon 305-380, Korea
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Shon Jung
Samsung Electronics Co., Ltd., Yongin, Gyeongi-do 433-742, Korea
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Choi Young
Korea Electrotechnology Research Institute, P.O. Box 20, Changwon, Kyungnam 641-600, Korea
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Kim Sung
Department of Advanced Materials Engineering for Information and Electronics, Kyung Hee University, Yongin, Gyeonggi 446-701, Republic of Korea
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