Effects of High-Temperature Metal-Organic Chemical Vapor Deposition of Pb(Zr, Ti)O_3 Thin Films on Structural Stabilities of Hybrid Pt/IrO_2/Ir Stack and Single-Layer Ir Bottom Electrodes
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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Choi E
Memory Research And Development Division Hynix Semiconductor Inc.
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YEOM Seung
Memory Research and Development Division, HYUNDAI Electronics Industries Co., Ltd.
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Kim Nam
Memory Research and Development Division, Hyundai Electronics Industries Co., Ltd.
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Yang Jun-mo
Memory R&d Division Hynix Semiconductor Inc.
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Yeom S
Memory Research And Development Division Hynix Semiconductor Inc.
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Roh J
Memory Research And Development Division Hynix Semiconductor Inc.
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Roh Jae-sung
Advanced Process-capacitor Memory Research & Development Division Hyundai Electronics Industries
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Roh Jae-sung
Memory Research And Development Division Hynix Semiconductor Inc.
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Roh Jae-sung
Memory R&d Division Hynix Semiconductor Inc.
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Yeom S
Hynix Semiconductor Inc. Kyoungki‐do Kor
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KIM Jin
Memory R&D Division, Hynix Semiconductor Inc.
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KWEON Soon
Memory Research and Development Division, Hynix Semiconductor Inc.
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CHOI Eun
Memory Research and Development Division, Hynix Semiconductor Inc.
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Kim Nam
Memory Research And Development Division Hynix Semiconductor Inc.
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SOHN Hyun-Chul
Memory R&D Division, Hynix Semiconductor Inc.
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SUN Ho-Jung
Memory Research and Development Division, Hynix Semiconductor Inc.
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LEE Tae
Memory Research and Development Division, Hynix Semiconductor Inc.
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HONG Tae
Memory Research and Development Division, Hynix Semiconductor Inc.
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Sohn H‐c
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Sohn Hyun-chul
Memory R&d Division Hynix Semiconductor Inc.
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Roh J‐s
Memory Research And Development Division Hynix Semiconductor Inc.
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Kweon Soon
Memory R&d Division Hynix Semiconductor Inc.
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Sun Ho-jung
Memory Research And Development Division Hynix Semiconductor Incorporation
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