Effects of High-Temperature Metal-Organic Chemical Vapor Deposition of Pb(Zr, Ti)O_3 Thin Films on Structural Stabilities of Hybrid Pt/IrO_2/Ir Stack and Single-Layer Ir Bottom Electrodes

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2004-05-15

著者

• Choi E

  Memory Research And Development Division Hynix Semiconductor Inc.

• YEOM Seung

  Memory Research and Development Division, HYUNDAI Electronics Industries Co., Ltd.

• Kim Nam

  Memory Research and Development Division, Hyundai Electronics Industries Co., Ltd.

• Yang Jun-mo

  Memory R&d Division Hynix Semiconductor Inc.

• Yeom S

  Memory Research And Development Division Hynix Semiconductor Inc.

• Roh J

  Memory Research And Development Division Hynix Semiconductor Inc.

• Roh Jae-sung

  Advanced Process-capacitor Memory Research & Development Division Hyundai Electronics Industries

• Roh Jae-sung

  Memory Research And Development Division Hynix Semiconductor Inc.

• Roh Jae-sung

  Memory R&d Division Hynix Semiconductor Inc.

• Yeom S

  Hynix Semiconductor Inc. Kyoungki‐do Kor

• KIM Jin

  Memory R&D Division, Hynix Semiconductor Inc.

• KWEON Soon

  Memory Research and Development Division, Hynix Semiconductor Inc.

• CHOI Eun

  Memory Research and Development Division, Hynix Semiconductor Inc.

• Kim Nam

  Memory Research And Development Division Hynix Semiconductor Inc.

• SOHN Hyun-Chul

  Memory R&D Division, Hynix Semiconductor Inc.

• SUN Ho-Jung

  Memory Research and Development Division, Hynix Semiconductor Inc.

• LEE Tae

  Memory Research and Development Division, Hynix Semiconductor Inc.

• HONG Tae

  Memory Research and Development Division, Hynix Semiconductor Inc.

• Sohn H‐c

  Hynix Semiconductor Inc. Kyoungki‐do Kor

• Sohn Hyun-chul

  Memory R&d Division Hynix Semiconductor Inc.

• Roh J‐s

  Memory Research And Development Division Hynix Semiconductor Inc.

• Kweon Soon

  Memory R&d Division Hynix Semiconductor Inc.

• Sun Ho-jung

  Memory Research And Development Division Hynix Semiconductor Incorporation

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