Thermal Stability and Electrical Properties of SrBi_2Ta<2-x>Nb_XO_9/IrO_x Capacitors With Pt Top Electrode : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-09-15
著者
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KWEON Soon
Department of Materials Science and Engineering, Korea Advanced Institute of Science andTechnology
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YEOM Seung
Memory Research and Development Division, HYUNDAI Electronics Industries Co., Ltd.
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ROH Jae
Memory Research and Development Division, HYUNDAI Electronics Industries Co., Ltd.
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Yang Woo
Memory Research and Development Division, Hyundai Electronics Industries Co., Ltd.
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Yeom S
Memory Research And Development Division Hynix Semiconductor Inc.
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Roh J‐s
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Roh J
Memory Research And Development Division Hynix Semiconductor Inc.
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Roh Jae-sung
Advanced Process-capacitor Memory Research & Development Division Hyundai Electronics Industries
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Roh Jae-sung
Memory R&d Division Hynix Semiconductor Inc.
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Yeom S
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Yeom Seung
Memory Research And Development Division Hynix Semiconductor Inc.
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KWEON Soon
Memory Research and Development Division, Hynix Semiconductor Inc.
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CHOl Si
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology
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Yang W
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Yeom Seung
Memory R&d Division Hynix Semiconductor Inc.
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Choi S
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Choi Si
Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology
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Roh Jae
Memory R & D Division Hynix Semiconductor Inc.
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Roh J‐s
Memory Research And Development Division Hynix Semiconductor Inc.
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Yang Woo
Memory Research And Development Division Hynix Semiconductor Inc.
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Kweon Soon
Memory Research And Development Division Hynix Semiconductor Inc.
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Kweon Soon
Memory R&d Division Hynix Semiconductor Inc.
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Kweon Soon
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusung-dong, Yusung-gu, Taejon 305-701, Korea
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