Dependence of Switching Characteristics on Fabrication Process and Capacitor Size for Pt/SBT/Pt Ferroelectric Capacitor

概要

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Effects of fabrication process and capacitor size on the switching characteristics were investigated for Pt/SrBi_2Ta_2O_9 (SBT)/Pt capacitors. The switchable polarization (P^*-P^∧) and its saturation characteristic with operation voltage were degraded by the damage during capacitor etching, intermediate level dielectric (ILD) formation, and contact-hole etching. They were also degraded with decreasing capacitor size, because of the greater damage for the smaller capacitor. By optimization of fabrication process such as use of capacitor level dielectric (CLD) under ILD and proper recovery annealing, the damage could be sufficiently minimized, then the switchable polarization and its saturation characteristic were independent on capacitor size in the range from 100×100 to 1.4×1.4 μm^2.
社団法人電子情報通信学会の論文
1999-07-23