Atomic Force Microscope Study of Two-Dimensional Dopant Delineation by Selective Chemical Etching
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概要
- 論文の詳細を見る
- 1997-09-16
著者
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Kim Chung
Memory Research And Development Division Hyundai Electronics Industries Co. Ltd.
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Seong Tae-yeon
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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Lee Dong-ho
Memory R&d Division Hyundai Electronics Co. Ltd.
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CHOI Kwang-Ki
Department of Materials Science and Engineering, Kwangju Institute of Science and Technology (K-JIST
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SOHN Yong
Memory R&D Division, Hyundai Electronics Co., Ltd.
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Seong Tae-yeon
Department Of Materials Science And Engineering And Centre For Electronic Materials Research Kwangju
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Sohn Yong
Memory R&d Division Hyundai Electronics Co. Ltd.
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Choi Kwang-ki
Department Of Materials Science And Engineering Kwangju Institute Of Science And Technology (k-jist)
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Kim Chung
Memory R&d Division Hyundai Electronics Co. Ltd.
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