Analytical electron microscopy study of nanometre-scate oxide formed in contact-hole-bottom Si surfaces
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概要
- 論文の詳細を見る
- 2003-06-01
著者
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Yang Jun-mo
Memory R&d Division Hynix Semiconductor Inc.
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Lee S‐y
Yonsei Univ. Seoul Kor
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Back Tae-sun
Memory Research And Development Division Hynix Semiconductor Inc
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Back Tae-sun
Memory R&d Division Hynix Semiconductor Inc.
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Kim Joong-jung
Memory Research And Development Division Hynix Semiconductor Inc
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Yang J‐m
Memory R&d Division Hynix Semiconductor Inc.
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Yang J‐m
Hynix Semiconductor Inc. Kyoungki‐do Kor
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Park Ju-chul
Memory Research And Development Division Hynix Semiconductor Inc.
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Lee Ho-seok
Memory Research And Development Division Hynix Semiconductor Inc
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LEE Soun-Young
Memory Research and Development Division, Hynix Semiconductor Inc.
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PARK Yoon-Baek
Memory Research and Development Division, Hynix Semiconductor Inc
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PARK Sung-Wook
Memory Research and Development Division, Hynix Semiconductor Inc
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Park Yoon-baek
Memory Research And Development Division Hynix Semiconductor Inc
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Park Sung-wook
Memory Research And Development Division Hynix Semiconductor Inc
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Park Ju-chul
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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KIM Joong-Jung
Memory R&D Division, Hynix Semiconductor Inc.
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- Analytical electron microscopy study of nanometre-scate oxide formed in contact-hole-bottom Si surfaces
- Transmission Electron Microscopy Study by Chemical Delineation in Si Devices
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- Effects of High-Temperature Metal-Organic Chemical Vapor Deposition of Pb(Zr,Ti)O3 Thin Films on Structural Stabilities of Hybrid Pt/IrO2/Ir Stack and Single-Layer Ir Bottom Electrodes
- Preparation and Characterization of RuOx Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition