Preparation and Characterization of RuO_x Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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Kim N‐s
Department Of Semiconductor Engineering Chungbuk National University
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KIM Nam-Soo
Department of Semiconductor Engineering, Chungbuk National University
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KIM Yeong-Seuk
Department of Semiconductor Engineering, Chungbuk National University
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PARK Ju-Chul
Analysis Team, Memory R&D Division, Hynix Semiconductor Inc.
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Kim Kyoung-won
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Kim Y‐s
Department Of Semiconductor Engineering Chungbuk National University
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Park Ju-chul
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Lee Hyung-gyoo
Department Of Semiconductor Engineering Chungbuk National University
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KANG Hee-Jae
Department of Physics, Chungbuk National University
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JOUNG Yang-Hee
Division of Electronic Communication and Electrical Engineering, Yesou National University
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KANG Seong-Jun
Division of Electronic Communication and Electrical Engineering, Yesou National University
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