Kim N‐s | Department Of Semiconductor Engineering Chungbuk National University

スポンサーリンク

概要

関連著者

もっと見る

著作論文

Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition
Effect of Poly Metal Gate Etch Post-Cleaning on the Tail Distribution of DRAM Data Retention Time
Impact of Gate Etch Damage and Profile in High Density DRAM Cell
Impact of Polymetal Gate Etch Post-Cleaning on Data Retention Time in Sub-micron DRAM Cells
Low-Damage Gate Etching With High Degree of Anisotropy in High-Density DRAM Cell
Preparation and Characterization of RuO_x Thin Films by Liquid Delivery Metalorganic Chemical Vapor Deposition

スポンサーリンク