Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-02-15
著者
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Kim N‐s
Department Of Semiconductor Engineering Chungbuk National University
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Choi Il-sang
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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KIM Kyoung-Won
Department of Semiconductor Engineering, Chungbuk National University
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KIM Nam-Soo
Department of Semiconductor Engineering, Chungbuk National University
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KIM Yeong-Seuk
Department of Semiconductor Engineering, Chungbuk National University
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KIM Ho-Joung
Analysis Team, Memory R&D Division, Hynix Semiconductor Inc.
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PARK Ju-Chul
Analysis Team, Memory R&D Division, Hynix Semiconductor Inc.
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LEE Soun-Young
Analysis Team, Memory R&D Division, Hynix Semiconductor Inc.
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Kim Kyoung-won
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Kim Ho-joung
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Kim Y‐s
Department Of Semiconductor Engineering Chungbuk National University
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Park Ju-chul
Memory Research And Development Division Hynix Semiconductor Inc.
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Kim Ho-joung
Analysis Development Team Memory R&d Division Hyundai Electronics Industries Co. Ltd.
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Kim Nam-soo
Department Of Agronomy Kangwan National University
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Kim Nam-sung
Memory R&d Division Hynix Semiconductor Inc.
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Lee Soun-young
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Park Ju-chul
Analysis Team Memory R&d Division Hynix Semiconductor Inc.
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Kim Yeong-seuk
Department Of Semiconductor Engineering Cbnu
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Kim Kyoung-won
Department Of Semiconductor Engineering Chungbuk National University
関連論文
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- Fabrication and Characterization of Ru Thin Films Prepared by Liquid Delivery Metal-Organic Chemical Vapor Deposition
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