Dielectric and Electromechanical Properties of Pb(Zr,Ti)O_3 Thin Films for Piezo-Microelectromechanical System Devices

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-09-30

著者

• Kim S‐h

  Prowtech Inc. Chungbuk Kor

• YOON Euijoon

  School of Materials Science and Engineering, Seoul National University

• Yoon E

  Seoul National Univ. Seoul Kor

• Yoon Euijoon

  School Of Materials Science And Engineering And Isrc Seoul National University

• PARK Joon-Shik

  Nano Mechatronics Research Center, Korea Electronics Technology Institute

• YANG Jeong-Suong

  R&D Center, Inostek Inc.

• KIM Seung-Hyun

  R&D Center, Inostek Inc.

• HA Jowoong

  R&D Center, Inostek Inc.

• Ha Jowoong

  R&d Center Inostek Inc.

• Hwang Cheol

  School Of Materials Science And Engineering Seoul National University

• Yoon Euijoon

  School Of Mat. Sci. And Eng. Seoul National Univ

• Park Joon-shik

  Nano Mechatronics Research Center Korea Electronics Technology Insitute

• KOO Chang

  R&D Center, INOSTEK Inc.

• YEOM Jung-Hoon

  R&D Center, INOSTEK Inc.

• KANG Sung-Goon

  Div. Of Mat. Sci. and Eng., Han Yang Univ

• KIM Dong-Joo

  Div. Of Mat. Sci., Argonne National Laboratory

• Kang S‐g

  Div. Of Mat. Sci. And Eng. Han Yang Univ

• Koo C

  R&d Center Inostek Inc.

• Yang J‐s

  R&d Center Inostek Inc.

• Hwang Cheol

  School Of Mat. Sci. And Eng. Seoul National Univ

• Kim Dong-joo

  Div. Of Mat. Sci. Argonne National Laboratory

• Yeom Jung-hoon

  R&d Center Inostek Inc.

• Koo C

  Inostek Inc. Gyeonggi Kor

• Yoon Euijoon

  School Of Electronic And Electrical Engineering Kyungpook National University

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