Fabrication and Electro-Mechanical Characteristics of Piezoelectric Micro Bending Actuators on Silicon Substrates(Properties(structural and functional)<Special Issue>Guest Editors Dedicated to Prof. Gunter Petzow: Modern Trends in Advanced Ceramics)

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Fabrication and the electro-mechanical characteristics of fourteen types of piezoelectric micro bending actuators(PMBA) on silicon substrates using sol-gel multi-coated, thick PZT (Pb(Zr_<0.52>, Ti<0.48>)O_3) films and MEMS processes were investigated. A PMBA was a piezoelectric body adhered to an elastic body. If an electrical field is applied to the z-axis, the piezoelectric body expands along the z-axis while contracting along the x- and y-axes. The elastic body was therefore deflected due to the generated bending moment. It was thought that PMBA might be used for designs of micro-fluidic devices and micro transducers. PMBA were fabricated using 2μm-thick PZT films on Pt (350nm)/SiO_2 (500nm) /Si (300μm) substrates with a MEMS process. Fourteen types of PMBA were fabricated with different sizes of silicon diaphragms, PZT films and top electrodes. When sizes of silicon diaphragms, PZT films, and Pt top electrodes with 3000μm by 1389μm, 4000μm by 1000μm, and 4000μm by 980μm were reduced down to 3000μm by 194μm, 4000μm by 140μm, and 4000μm by 120μm, respectively, the center displacements of PMBA were decreased from 0.70μm to 0.13μm at 5Hz and 12 V_<pp>. At 5 V_<pp> and 10kHz, in case of Sample 1 of Group 4, the center displacements were maintained in the range of 0.50μm-0.56μm up to 1.25 G cycles without remarkable degradation.
社団法人日本セラミックス協会の論文
2006-11-01