Effects of the Microstructure of Platinum Electrode on the Oxidation Behavior of TiN Diffusion Barrier Layer
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-02-15
著者
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YOON Euijoon
School of Materials Science and Engineering, Seoul National University
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Yoon Euijoon
School Of Materials Science And Engineering And Inter-university Semiconductor Research Center Seoul
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LEE Dong-Su
Inostek, Inc,
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PARK Dong-Yeon
Inostek, Inc
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WOO Hyun-Jung
Inostek, Inc
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HA Jowoong
Inostek, Inc
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Ha Jowoong
Inostek Inc.
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Hwang Cheol
School Of Materials Science And Engineering Seoul National University
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Hwang Cheol
School Of Materials Science And Engineering And Inter-university Semiconductor Research Center Seoul
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Lee Dong-su
Inostek Inc.
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Woo Hyun-jung
Inostek Inc.
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Park Dong-yeon
Inostek Inc.
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Lee Dong-su
Inostek Inc
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Woo Hyun-jung
Inostek Inc
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Hwang Cheol
School Of Mat. Sci. And Eng. Seoul National Univ
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Yoon Euijoon
School Of Electronic And Electrical Engineering Kyungpook National University
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