Post-Annealing Effects on Fixed Charge and Slow/Fast Interface States of TiN/Al_2O_3p-Si Metal-Oxide-Semiconductor Capacitor

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2003-03-15

著者

• Hwang Cheol

  School Of Materials Science And Engineering Seoul National University

• Hwang Cheol

  School Of Materials Science & Engineering Seoul National University

• Lee Jong-ho

  Advanced Process & Development Team System Lsi Division & 3technology & Development Team

• PARK Chan

  Department of Anatomy, College of Medicine, Kyung Hee University

• LEE Nae-In

  Advanced Technology Center, Samsung Electronics Co. Ltd.

• CHO Hoon

  Department of Physics, Dongguk University

• Kim Hyeong

  School of Materials Science and Engineering, Seoul National University

• Park Chan

  Department Of Physics Dongguk University

• Lee Nae-in

  Advanced Process & Development Team System Lsi Division & 3technology & Development Team

• Cho Hoon

  Department Of Physics Dongguk University

• Jeon In

  School Of Materials Science & Engineering Seoul National University

• Kim H

  School Of Materials Science & Engineering Seoul National University

• Hwang Cheol

  School Of Mat. Sci. And Eng. Seoul National Univ

• Kang Ho-kyu

  Advanced Process & Development Team System Lsi Division & 3technology & Development Team

• PARK Jaehoo

  School of Materials Science & Engineering, Seoul National University

• EOM Dail

  School of Materials Science & Engineering, Seoul National University

• Park Jaehoo

  School Of Material Science And Engineering Seoul National University

• Park Jaehoo

  School Of Materials Science & Engineering Seoul National University

• Eom Dail

  School Of Materials Science & Engineering Seoul National University

• Kim Hyeong

  School Of Materials Science And Engineering Seoul National University

• Kim Hyeong

  School Of Materials Science & Engineering Seoul National University

• Kim Hyeong

  School Of Electrical And Electronics Engineering Chung-ang University

• Park Chan

  Department Of Anatomy College Of Medicine Kyung Hee University

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